Semiconductor Device and Method for Manufacturing the Same

• US 20110207255A1
• Filed: 05/03/2011
• Published: 08/25/2011
• Est. Priority Date: 02/18/2005
• Status: Active Grant

• Current Assignee: Semiconductor Energy Laboratory Co., Ltd.
• Original Assignee: Semiconductor Energy Laboratory Co., Ltd.
• Inventors: Kuwabara, Hideaki, Noda, Takeshi, Yamazaki, Shunpei, Sakakura, Masayuki
• Granted Patent: US 9,093,402 B2
• Time in Patent Office: Days
• US Class Current: 438/34
• CPC Class Codes: H10K 2102/3026 Top emission
• CPC Class Codes: H10K 50/155 comprising dopants
• CPC Class Codes: H10K 50/81 Anodes
• CPC Class Codes: H10K 50/813 characterised by their shape
• CPC Class Codes: H10K 50/818 Reflective anodes, e.g. ITO combined with thick metallic layers
• CPC Class Codes: H10K 59/12 Active-matrix OLED [AMOLED] displays
• CPC Class Codes: H10K 59/123 Connection of the pixel electrodes to the thin film transistors [TFT]
• CPC Class Codes: H10K 59/38 comprising colour filters or colour changing media [CCM]
• CPC Class Codes: H10K 59/80515 characterised by their shape
• CPC Class Codes: H10K 59/80518 Reflective anodes, e.g. ITO combined with thick metallic layers
• CPC Class Codes: H10K 71/00 Manufacture or treatment specially adapted for the organic devices covered by this subclass
• CPC Class Codes: H10K 71/166 using selective deposition, e.g. using a mask
• CPC Class Codes: H10K 71/40 Thermal treatment, e.g. annealing in the presence of a solvent vapour

Abstract

A manufacturing method of an active matrix light emitting device in which the active matrix light emitting device can be manufactured in a shorter time with high yield at low cost compared with conventional ones will be provided. It is a feature of the present invention that a layered structure is employed for a metal electrode which is formed in contact with or is electrically connected to a semiconductor layer of each TFT arranged in a pixel area of an active matrix light emitting device. Further, the metal electrode is partially etched and used as a first electrode of a light emitting element. A buffer layer, a layer containing an organic compound, and a second electrode layer are stacked over the first electrode.

Claims

1-34. -34. (canceled)

35. A method of manufacturing a light emitting device, comprising the steps of:

conveying a substrate in a chamber along a first direction so that the substrate passes over a shield having at least one opening on an upper portion of the shield,

heating an evaporation material in an evaporation source provided below the shield so that the evaporation material is let out from the opening of the shield while conveying the substrate over the shield, thereby, forming a light emitting layer containing the evaporation material on the substrate;

heating the shield during the formation of the light emitting layer,

wherein the opening has an elongated shape having an elongation direction along a second direction orthogonal to the first direction.

36. The method according to claim 35 wherein the heating of the shield is controlled by a computer.

37. The method according to claim 35 wherein the chamber is connected to a setting chamber through a gate so that the evaporation source can be supplied with an evaporation material in the setting chamber without a necessity of letting an inside of the chamber be an atmospheric pressure.

38. The method according to claim 35 wherein the heating of the evaporation material is performed by resistance heating.

39. The method according to claim 35 wherein the shield has a plurality of openings on the upper portion thereof.

40. The method according to claim 35 wherein the evaporation source is provided with a plurality of crucibles.

41. The method according to claim 35 wherein the evaporation material is sublimed through the opening of the shield.

42. The method according to claim 35 wherein the evaporation material comprises an organic light emitting material.

43. The method according to claim 35 wherein the light emitting device is a light source.

44. The method according to claim 35 wherein the light emitting device is an image display device.

45. The method according to claim 35 wherein the light emitting device is a lighting device.

46. A method of manufacturing a light emitting device, comprising the steps of:

conveying a substrate in a chamber along a first direction so that the substrate passes over a shield having at least one opening on an upper portion of the shield, the shield having a width in a second direction orthogonal to the first direction,

heating an evaporation material in an evaporation source provided below the shield so that the evaporation material is let out from the opening of the shield while conveying the substrate over the shield, thereby, forming a light emitting layer containing the evaporation material on the substrate;

heating the shield during the formation of the light emitting layer,

wherein the shield has a width along the second direction and the width of the shield is larger than a width of the substrate.

47. The method according to claim 46 wherein the shield has a plurality of openings on the upper portion thereof.

48. The method according to claim 46 wherein the evaporation source is provided with a plurality of crucibles.

49. The method according to claim 46 wherein the evaporation material is sublimed through the opening of the shield.

50. The method according to claim 46 wherein the evaporation material comprises an organic light emitting material.

51. A method of manufacturing a light emitting device, comprising the steps of:

conveying a substrate in a chamber along a first direction so that the substrate passes over a shield having at least one opening on an upper portion of the shield, the shield having a width in a second direction orthogonal to the first direction,

heating an evaporation material in an evaporation source provided below the shield so that the evaporation material is let out from the opening of the shield while conveying the substrate over the shield, thereby, forming a light emitting layer containing the evaporation material on the substrate;

heating the shield during the formation of the light emitting layer; and

moving the evaporation source in the second direction during the formation of the light emitting layer,

wherein the shield has a width along the second direction and the width of the shield is larger than a width of the substrate.

52. A method of manufacturing a light emitting device, comprising the steps of

conveying a substrate along a first direction so that the substrate passes over a first shield having at least one opening on an upper portion of the first shield and a second shield having at least one opening on an upper portion of the second shield,

heating a first evaporation material in a first evaporation source provided below the first shield so that the first evaporation material is let out from the opening of the first shield while conveying the substrate over the first shield, thereby, forming a first layer containing the first evaporation material on the substrate;

heating the first shield during the formation of the first layer,

heating a second evaporation material in a second evaporation source provided below the second shield so that the second evaporation material is let out from the opening of the second shield while conveying the substrate over the second shield, thereby, forming a second layer containing the second evaporation material on the first layer;

heating the second shield during the formation of the second layer,

wherein one of the first layer and the second layer is a light emitting layer, and

wherein the opening of each of the first shield and the second shield has an elongated shape having an elongation direction along a second direction orthogonal to the first direction.

53. A method of manufacturing a light emitting device, comprising the steps of:

providing a first crucible containing an organic compound and a second crucible containing an inorganic compound in an evaporation source;

conveying a substrate in a chamber along a first direction so that the substrate passes over a shield having at least one opening on an upper portion of the shield wherein the evaporation source is provided below the shield,

heating the organic compound and the inorganic compound in the evaporation source while conveying the substrate over the shield, thereby, forming a layer containing the organic compound and the inorganic compound on the substrate;

heating the shield during the formation of the layer,

wherein the opening has an elongated shape having an elongation direction along a second direction orthogonal to the first direction.

54. A method of manufacturing a light emitting device, comprising the steps of:

providing a first crucible containing an organic compound and a second crucible containing an inorganic compound in an evaporation source;

conveying a substrate in a chamber along a first direction so that the substrate passes over a shield having at least one opening on an upper portion of the shield, the shield having a width in a second direction orthogonal to the first direction wherein the evaporation source is provided below the shield,

heating the organic compound and the inorganic compound in the evaporation source while conveying the substrate over the shield, thereby, forming a layer containing the organic compound and the inorganic compound on the substrate;

heating the shield during the formation of the layer,

wherein the shield has a width along the second direction and the width of the shield is larger than a width of the substrate.

55. A method of manufacturing a light emitting device, comprising the steps of:

providing a first evaporation source including a first crucible containing a first organic compound and a second crucible containing an inorganic compound in a chamber wherein the first evaporation source is provided below a first shield in the chamber;

providing a second evaporation source including a third crucible containing a second organic compound in the chamber wherein the second evaporation source is provided below a second shield adjacent to the first shield in the chamber, each of the first evaporation source and the second evaporation source having at least opening on an upper portion thereof;

conveying a substrate in the chamber along a first direction so that the substrate passes over the first shield and the second shield continuously,

heating the first organic compound and the inorganic compound in the first evaporation source while conveying the substrate in the chamber, thereby, forming a first layer containing the first organic compound and the inorganic compound on the substrate;

heating the first shield during the formation of the first layer,

heating the second organic compound in the second evaporation source while conveying the substrate in the chamber, thereby, foaming a second light emitting layer containing the second organic compound over the first layer;

heating the second shield during the formation of the second layer,

wherein the opening of each of the first shield and the second shield has an elongated shape having an elongation direction along a second direction orthogonal to the first direction.