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THIN FILM COATED PROCESS KITS FOR SEMICONDUCTOR MANUFACTURING TOOLS

  • US 20110207332A1
  • Filed: 05/12/2010
  • Published: 08/25/2011
  • Est. Priority Date: 02/25/2010
  • Status: Abandoned Application
First Claim
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1. A semiconductor manufacturing apparatus comprising a plasma processing chamber including therein a process kit formed of quartz and having a Y2O3 coating on exposed surfaces thereof.

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