Gas Delivery System For Mass Spectrometer Reaction And Collision Cells

• US 20110210241A1
• Filed: 02/22/2011
• Published: 09/01/2011
• Est. Priority Date: 02/26/2010
• Status: Active Grant

• Current Assignee: DH Technologies Development Pte. Ltd. (Danaher Corporation)
• Original Assignee: DH Technologies Development Pte. Ltd. (Danaher Corporation)
• Inventors: Kahen, Kaveh, Badiei, Hamid R.
• Granted Patent: US 8,373,117 B2
• Time in Patent Office: Days
• US Class Current: 250/282
• CPC Class Codes: G05D 7/0635 by action on throttling means G05D7/0688, G05D7/0694 take precedence
• CPC Class Codes: H01J 49/105 using high-frequency excitation, e.g. microwave excitation, Inductively Coupled Plasma [ICP]
• CPC Class Codes: H01J 49/24 Vacuum systems, e.g. maintaining desired pressures
• CPC Class Codes: Y10T 137/877 With flow control means for branched passages
• CPC Class Codes: Y10T 137/87877 Single inlet with multiple distinctly valved outlets

Abstract

A gas delivery system for a cell-based mass spectrometer includes a mass flow controller having an input coupled to a gas source. A three-way valve includes an input coupled to an output of the mass flow controller, a first output coupled to a vacuum system, and a second output normally coupled to a reaction or collision cell. A cell is positioned inside a vacuum chamber of the mass spectrometer where the second output of the three-way valve is coupled to an inlet of the cell and the mass flow controller provides a gas to the cell that increases a pressure inside the cell relative to the pressure in the vacuum chamber.

Claims

1. A gas delivery system for a cell-based mass spectrometer, the gas delivery system comprising:

a. a mass flow controller having an input coupled to a gas source;

b. a three-way valve having an input coupled to an output of the mass flow controller, a first output coupled to a vacuum system, and a second output; and

c. a cell positioned inside a vacuum chamber of a mass spectrometer, the second output of the three-way valve being coupled to an inlet of the cell, the mass flow controller providing a gas to the cell that increases a pressure inside the cell relative to the pressure in the vacuum chamber.

2. The gas delivery system of claim 1 wherein the gas comprises a collision gas.

3. The gas delivery system of claim 1 wherein the gas comprises a reaction gas.

4. The gas delivery system of claim 1 wherein the first output of the three-way valve is normally open and the second output of the three-way valve is normally closed.

5. The gas delivery system of claim 1 wherein the three-way valve is electrically controlled and a signal to the three-way valve opens the second output of the three-way valve to provide gas to the cell.

6. The gas delivery system of claim 1 wherein the gas source comprises a gas manifold coupled to a plurality of gas cylinders.

7. The gas delivery system of claim 1 further comprising a purge valve positioned between the gas source and the input to the mass flow controller, an output of the purge valve being coupled to an inlet of an exhaust line.

8. The gas delivery system of claim 1 wherein a gas line from the output of the mass flow controller to the input of the cell has an inside diameter that provides enough gas flow conductance to purge the gas lines and fill the cell with a flow rate that achieves steady state operation of the mass spectrometer within 10 seconds.

9. A gas delivery system for a cell-based mass spectrometer, the gas delivery system comprising:

a. a plurality of mass flow controllers, each of the plurality of mass flow controllers having an input coupled to an output of a respective one of a plurality of gas sources;

b. a plurality of three-way valves, each of the plurality of three-way valves having an input that is coupled to an output of a respective one of the plurality of mass flow controllers, a first output of each of the plurality of three-way valves being coupled to a vacuum system; and

c. a cell positioned inside a vacuum chamber of a mass spectrometer, a second output of each of the plurality of three-way valves being coupled to an inlet of the cell, at least one of the plurality of mass flow controllers providing a gas to the cell that increases a pressure inside the cell relative to the pressure in the vacuum chamber.

10. The gas delivery system of claim 9 wherein the gas comprises a collision gas.

11. The gas delivery system of claim 9 wherein the gas comprises a reaction gas.

12. The gas delivery system of claim 9 wherein the first output of the plurality of three-way valves is normally open and the second output of the plurality of three-way valves is normally closed.

13. The gas delivery system of claim 9 wherein the plurality of three-way valves is electrically controlled and a signal applied to each of the plurality of three-way valves opens the second output to provide gas to the cell.

14. The gas delivery system of claim 9 further comprising at least one purge valve positioned between the plurality of gas sources and the inputs of the plurality of mass flow controllers, an output of the at least one purge valve being coupled to an exhaust system.

15. The gas delivery system of claim 9 wherein a gas line from the output of at least one of the plurality of mass flow controllers to the cell has an inside diameter that provides enough gas flow conductance to purge the gas lines and fill the cell with a flow rate that achieves steady state operation of the mass spectrometer within 10 seconds.

16. A method for delivering gas to a cell-based mass spectrometer, the method comprising:

a. providing a gas to a mass flow controller;

b. evacuating the gas from an output of the mass flow controller; and

c. metering the gas with the mass flow controller and directing the metered gas to a cell inside a mass spectrometer.

17. The method of claim 16 wherein the gas comprises a reaction gas.

18. The method of claim 16 wherein the gas comprises a collision gas.

19. The method of claim 17 wherein the reaction gas comprises at least one of ammonia, methane, oxygen, methyl fluoride, and hydrogen.

20. The method of claim 18 wherein the collision gas comprises at least one of helium and neon.

21. The method of claim 16 further comprising providing a gas conductance from the output of the mass flow controller to the cell that achieves relatively low switching times between a vented-cell mode and pressurized mode of operation.

22. The method of claim 21 wherein the gas conductance achieves a low dead volume between the output of the mass flow controller and the cell.

23. The method of claim 21 wherein the gas conductance is sufficient to fill the cell with a flow rate that achieves steady state operation of the mass spectrometer within 10 seconds.