III-NITRIDE SEMICONDUCTOR LIGHT-EMITTING DEVICE AND MANUFACTURING METHOD THEREOF
First Claim
1. A III-nitride semiconductor light-emitting device, comprising:
- a substrate;
a first type semiconductor layer comprising a first surface and a second surface wherein the first surface is disposed adjacent to the substrate and opposite to the second surface, and the second surface comprises a plurality of recesses;
a conformational active layer formed on the second surface and within the plurality of recesses; and
a second type semiconductor layer formed on the conformational active layer,wherein widths of upper portions of the recesses are larger than widths of lower portions of the recesses.
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Abstract
A semiconductor light-emitting device includes a substrate, a buffer layer, an n-type semiconductor layer, a conformational active layer and a p-type semiconductor layer. The n-type semiconductor layer includes a first surface and a second surface, and the first surface directly contacts the buffer layer. The second surface includes a plurality of recesses, and a conformational active layer formed on the second surface and within the plurality of recesses. Widths of upper portions of the recesses are larger than widths of lower portions of the recesses. Therefore, the stress between the n-type semiconductor layer and the conformational active layer can be released with the recesses.
21 Citations
12 Claims
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1. A III-nitride semiconductor light-emitting device, comprising:
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a substrate; a first type semiconductor layer comprising a first surface and a second surface wherein the first surface is disposed adjacent to the substrate and opposite to the second surface, and the second surface comprises a plurality of recesses; a conformational active layer formed on the second surface and within the plurality of recesses; and a second type semiconductor layer formed on the conformational active layer, wherein widths of upper portions of the recesses are larger than widths of lower portions of the recesses. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12)
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Specification