High-Efficiency MEMS Micro-Vibrational Energy Harvester And Process For Manufacturing Same
First Claim
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1. A vibrational energy harvesting device comprising:
- a cantilever having a first end, a second end and a core having, a first planar surface and a second planar surface, the core being fabricated as two plate layers and bonded together;
a first piezoelectric stack having a piezoelectric material placed between a first conductive layer and a second conductive layer and attached to the first planar surface of said core;
a second piezoelectric stack having a piezoelectric material placed between a first conductive layer and a second conductive layer and attached to the second planar surface of said core; and
a casing wherein the first end of the cantilever is joined to the casing and the second end is free to move.
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Abstract
The present invention relates generally to a High Efficiency MEMS Micro-Vibrational Energy Harvester (μVEH) having a thick beam bimorph architecture. The disclosed architecture is capable of producing a voltage of sufficient magnitude such that the requirement to connect a plurality of harvesters in series to produce an adequate voltage magnitude is eliminated.
51 Citations
25 Claims
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1. A vibrational energy harvesting device comprising:
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a cantilever having a first end, a second end and a core having, a first planar surface and a second planar surface, the core being fabricated as two plate layers and bonded together; a first piezoelectric stack having a piezoelectric material placed between a first conductive layer and a second conductive layer and attached to the first planar surface of said core; a second piezoelectric stack having a piezoelectric material placed between a first conductive layer and a second conductive layer and attached to the second planar surface of said core; and a casing wherein the first end of the cantilever is joined to the casing and the second end is free to move. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12, 13, 14, 23, 24, 25)
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15. A chipset having a substrate and a vibrational energy harvesting device comprising a cantilever having a first end, a second end and a core having a first planar surface and a second planar surface, the core being fabricated as two plate layers and bonded together;
- a first piezoelectric stack having a piezoelectric material placed between a first conductive layer and a second conductive layer and attached to the first planar surface of said core;
a second piezoelectric stack having a piezoelectric material placed between a first conductive layer and a second conductive layer and attached to the second planar surface of said core; and
a casing wherein the first end of the cantilever is joined to the casing and the second end is free to move. - View Dependent Claims (16, 17)
- a first piezoelectric stack having a piezoelectric material placed between a first conductive layer and a second conductive layer and attached to the first planar surface of said core;
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18. A method for fabricating a vibrational energy harvesting device comprising the steps of:
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creating a first wafer set and a second wafer set by forming an oxide layer on a substrate; depositing a first and second piezoelectric stack on the substrate; patterning a first electrode; patterning a piezoelectric material; patterning a second electrode; depositing bond pads; depositing a contact layer; etching contacts in said contact layer; patterning a core layer; aligning the plate layer of the first wafer set with the plate layer of the second wafer set; bonding said first wafer set to said second wafer set; patterning a resulting vibrational energy harvesting device; and singulating and releasing the resulting vibrational energy harvesting device. - View Dependent Claims (19, 20, 21, 22)
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Specification