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High-Efficiency MEMS Micro-Vibrational Energy Harvester And Process For Manufacturing Same

  • US 20110210554A1
  • Filed: 02/18/2011
  • Published: 09/01/2011
  • Est. Priority Date: 02/26/2010
  • Status: Active Grant
First Claim
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1. A vibrational energy harvesting device comprising:

  • a cantilever having a first end, a second end and a core having, a first planar surface and a second planar surface, the core being fabricated as two plate layers and bonded together;

    a first piezoelectric stack having a piezoelectric material placed between a first conductive layer and a second conductive layer and attached to the first planar surface of said core;

    a second piezoelectric stack having a piezoelectric material placed between a first conductive layer and a second conductive layer and attached to the second planar surface of said core; and

    a casing wherein the first end of the cantilever is joined to the casing and the second end is free to move.

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