ELECTROCONDUCTIVE LAMINATE AND PROTECTIVE PLATE FOR PLASMA DISPLAY
First Claim
1. An electroconductive laminate comprising a substrate and an electroconductive film formed on the substrate, wherein the electroconductive film has laminated n lamination units (wherein n is an integer of from 1 to 6) each having a first metal oxide layer, a second metal oxide layer and a metal layer arranged in this order from the substrate side, and further has a first metal oxide layer disposed as the outermost layer of the electroconductive film;
- the first metal oxide layer is an oxide layer containing titanium element and an M element, wherein the M element is at least one element selected from the group consisting of elements having atomic weights of at least 80, and the amount of the M element is from 10 to 60 atom % in the total amount of titanium element and the M element in the first metal oxide layer;
the second metal oxide layer is a layer having, as its main component, an oxide containing zinc element;
the metal layer is a layer having silver as its main component; and
the second metal oxide layer and the metal layer in the lamination unit are directly in contact with each other.
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Accused Products
Abstract
To provide an electroconductive laminate which has an excellent electrical conductivity (electromagnetic wave shielding properties) and a high visible light transmittance and is excellent in productivity, and a protective plate for a plasma display which has excellent electromagnetic wave shielding properties and a broad transmission/reflection band and is excellent in productivity.
An electroconductive laminate comprising a substrate and an electroconductive film formed on the substrate, wherein the electroconductive film has laminated n lamination units (wherein n is an integer of from 1 to 6) each having a first metal oxide layer, a second metal oxide layer and a metal layer arranged in this order from the substrate side, and further has a first metal oxide layer disposed as the outermost layer of the electroconductive film; the first metal oxide layer is an oxide layer containing titanium element and an M element, wherein the M element is at least one element selected from the group consisting of elements having atomic weights of at least 80, and the amount of the M element is from 10 to 60 atom % in the total amount of titanium element and the M element in the first metal oxide layer; the second metal oxide layer is a layer having, as its main component, an oxide containing zinc element; the metal layer is a layer having silver as its main component; and the second metal oxide layer and the metal layer in the lamination unit are directly in contact with each other.
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Citations
9 Claims
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1. An electroconductive laminate comprising a substrate and an electroconductive film formed on the substrate, wherein the electroconductive film has laminated n lamination units (wherein n is an integer of from 1 to 6) each having a first metal oxide layer, a second metal oxide layer and a metal layer arranged in this order from the substrate side, and further has a first metal oxide layer disposed as the outermost layer of the electroconductive film;
- the first metal oxide layer is an oxide layer containing titanium element and an M element, wherein the M element is at least one element selected from the group consisting of elements having atomic weights of at least 80, and the amount of the M element is from 10 to 60 atom % in the total amount of titanium element and the M element in the first metal oxide layer;
the second metal oxide layer is a layer having, as its main component, an oxide containing zinc element;
the metal layer is a layer having silver as its main component; and
the second metal oxide layer and the metal layer in the lamination unit are directly in contact with each other. - View Dependent Claims (3, 5)
- the first metal oxide layer is an oxide layer containing titanium element and an M element, wherein the M element is at least one element selected from the group consisting of elements having atomic weights of at least 80, and the amount of the M element is from 10 to 60 atom % in the total amount of titanium element and the M element in the first metal oxide layer;
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2. An electroconductive laminate comprising a substrate and an electroconductive film formed on the substrate, wherein the electroconductive film has laminated n lamination units (wherein n is an integer of from 1 to 6) each having a first metal oxide layer, a second metal oxide layer and a metal layer arranged in this order from the substrate side, and further has a first metal oxide layer disposed as the outermost layer of the electroconductive film;
- the first metal oxide layer is an oxide layer containing titanium element and an M element, wherein the M element is niobium element, tantalum element, zirconium element or hafnium element, and the amount of the M element is from 10 to 60 atom % in the total amount of titanium element and the M element in the first metal oxide layer;
the second metal oxide layer is a layer having, as its main component, an oxide containing zinc element;
the metal layer is a layer having silver as its main component; and
the second metal oxide layer and the metal layer in the lamination unit are directly in contact with each other. - View Dependent Claims (4)
- the first metal oxide layer is an oxide layer containing titanium element and an M element, wherein the M element is niobium element, tantalum element, zirconium element or hafnium element, and the amount of the M element is from 10 to 60 atom % in the total amount of titanium element and the M element in the first metal oxide layer;
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6. A process for producing an electroconductive laminate, which comprises repeating the following steps (1) to (3) n times (wherein n is an integer of from 1 to 6);
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and then forming a first metal oxide layer as the outermost layer by carrying out the following step (1); (1) a step of forming a first metal oxide layer on one surface of a substrate by a sputtering method using a target containing titanium element and an M element (wherein the M element is at least one element selected from the group consisting of elements having atomic weights of at least
80);(2) a step of forming a second metal oxide layer by a sputtering method using a target containing zinc element; (3) a step of forming a metal layer by a sputtering method using a target containing silver as its main component.
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7. A process for producing an electroconductive laminate, which comprises repeating the following steps (1) to (4) n times (wherein n is an integer of from 1 to 6);
- and then forming a first metal oxide layer as the outermost layer by carrying out the following step (1);
(1) a step of forming a first metal oxide layer on one surface of a substrate by a sputtering method using a target containing titanium element and an M element (wherein the M element is at least one element selected from the group consisting of elements having atomic weights of at least
80);(2) a step of forming a second metal oxide layer by a sputtering method using a target containing zinc element; (3) a step of forming a metal layer by a sputtering method using a target containing silver as its main component; (4) a step of forming a third metal oxide layer by a sputtering method using a target containing zinc element.
- and then forming a first metal oxide layer as the outermost layer by carrying out the following step (1);
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8. A process for producing an electroconductive laminate, which comprises repeating the following steps (1) to (3) in total n times (wherein n is an integer of from 1 to 6);
- and then forming a first metal oxide layer as the outermost layer by carrying out the following step (1);
(1) a step of forming a first metal oxide layer on one surface of a substrate by a sputtering method using a target containing titanium element and an M element (wherein the M element is niobium element, tantalum element, zirconium element or hafnium element); (2) a step of forming a second metal oxide layer by a sputtering method using a target containing zinc element; (3) a step of forming a metal layer by a sputtering method using a target containing silver as its main component.
- and then forming a first metal oxide layer as the outermost layer by carrying out the following step (1);
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9. A process for producing an electroconductive laminate, which comprises repeating the following steps (1) to (4) in total n times (wherein n is an integer of from 1 to 6);
- and then forming a first metal oxide layer as the outermost layer by carrying out the following step (1);
(1) a step of forming a first metal oxide layer on one surface of a substrate by a sputtering method using a target containing titanium element and an M element (wherein the M element is niobium element, tantalum element, zirconium element or hafnium element); (2) a step of forming a second metal oxide layer by a sputtering method using a target containing zinc element; (3) a step of forming a metal layer by a sputtering method using a target containing silver as its main component; (4) a step of forming a third metal oxide layer by a sputtering method using a target containing zinc element.
- and then forming a first metal oxide layer as the outermost layer by carrying out the following step (1);
Specification