ROOM-TEMPERATURE BONDING METHOD AND ROOM-TEMPERATURE BONDING APPARATUS
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Abstract
A method of room-temperature bonding a plurality of substrates via an intermediate member, includes: forming the intermediate member on a surface to be bonded of the substrate by physically sputtering a plurality of targets; and activating the surface to be bonded by an ion beam. In this case, it is preferable that the target composed of a plurality of types of materials is physically sputtered. Since the materials of the intermediate member are sputtered from the plurality of targets arranged in various directions from the surface to be bonded of the substrate, the intermediate member can be uniformly formed on the surface to be bonded. Further, since the intermediate member is composed of the plurality of types of materials, the room-temperature bonding of substrates difficult to bond together when an intermediate member is composed of a single type of material can be performed without heating and excessively pressing the substrates during bonding.
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Citations
17 Claims
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1-7. -7. (canceled)
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8. A room-temperature bonding apparatus comprising:
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a vacuum chamber, an evacuation apparatus evacuating said vacuum chamber, a pair of substrate holders arranged to face each other in said vacuum chamber, a pressure bonding mechanism connected to said substrate holder to bond substrates mounted on the respective substrate holders to each other, and a physical sputtering source, wherein a target irradiated with ion beams or atom beams emitted from said physical sputtering source is arranged in said vacuum chamber independently of said substrate holders, said pressure bonding mechanism and said physical sputtering source. - View Dependent Claims (9, 10, 11, 12, 13, 14, 15, 16, 17)
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Specification