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ACCELERATION SENSOR WITH PROTRUSIONS FACING STOPPERS

  • US 20110215067A1
  • Filed: 05/20/2011
  • Published: 09/08/2011
  • Est. Priority Date: 03/14/2006
  • Status: Abandoned Application
First Claim
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1. A method for fabricating an acceleration sensor, comprising:

  • preparing a substrate having a first layer, a second layer, and a joining layer through which the first layer is joined to the second layer;

    patterning the first layer to form a mass attachment section, a peripheral attachment section surrounding and spaced apart from the mass attachment section, at least one beam flexibly linking the mass attachment section to the peripheral attachment section, and at least one stopper contiguously joined to the peripheral attachment section and spaced apart from the mass attachment section and the beam;

    patterning the second layer to form a mass spaced apart from the stopper and having a surface facing the stopper, and a frame surrounding and spaced apart from the mass; and

    selectively removing a part of the joining layer to leave a first joining layer joining the mass to the mass attachment section, a second joining layer joining the frame to the peripheral attachment section, and at least one protrusion protruding from the surface of the mass toward the stopper, the protrusion being spaced apart from the stopper.

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