SEMICONDUCTOR DEVICE AND MANUFACTURING METHOD THEREOF
First Claim
1. A manufacturing method of a semiconductor device, comprising the steps of:
- forming a gate electrode over a substrate having an insulating surface;
forming a gate insulating layer over the gate electrode;
forming an oxide semiconductor layer overlapping with the gate electrode and in contact with the gate insulating layer;
adding a halogen element into the oxide semiconductor layer;
performing first heat treatment on the oxide semiconductor layer after the addition of the halogen element;
forming a source electrode and a drain electrode each having an end portion overlapping with the gate electrode and in contact with the oxide semiconductor layer after performing the first heat treatment; and
forming an insulating layer overlapping with a channel formation region of the oxide semiconductor layer and in contact with the oxide semiconductor layer.
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Accused Products
Abstract
An object of the present invention to provide a highly reliable semiconductor device. Another object is to provide a manufacturing method of a highly reliable semiconductor device. Still another object is to provide a semiconductor device having low power consumption. Yet another object is to provide a manufacturing method of a semiconductor device having low power consumption. Furthermore, another object is to provide a semiconductor device which can be manufactured with high mass productivity. Another object is to provide a manufacturing method of a semiconductor device which can be manufactured with high mass productivity. An impurity remaining in an oxide semiconductor layer is removed so that the oxide semiconductor layer is purified to have an extremely high purity. Specifically, after adding a halogen element into the oxide semiconductor layer, heat treatment is performed to remove an impurity from the oxide semiconductor layer. The halogen element is preferably fluorine.
176 Citations
16 Claims
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1. A manufacturing method of a semiconductor device, comprising the steps of:
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forming a gate electrode over a substrate having an insulating surface; forming a gate insulating layer over the gate electrode; forming an oxide semiconductor layer overlapping with the gate electrode and in contact with the gate insulating layer; adding a halogen element into the oxide semiconductor layer; performing first heat treatment on the oxide semiconductor layer after the addition of the halogen element; forming a source electrode and a drain electrode each having an end portion overlapping with the gate electrode and in contact with the oxide semiconductor layer after performing the first heat treatment; and forming an insulating layer overlapping with a channel formation region of the oxide semiconductor layer and in contact with the oxide semiconductor layer. - View Dependent Claims (3, 5, 7, 9, 11)
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2. A manufacturing method of a semiconductor device, comprising the steps of:
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forming a source electrode and a drain electrode over a substrate having an insulating surface; forming an oxide semiconductor layer covering an end portion of the source electrode and an end portion of the drain electrode; adding a halogen element into the oxide semiconductor layer; performing first heat treatment on the oxide semiconductor layer after the addition of the halogen element; forming a gate insulating layer overlapping with the end portion of the source electrode and the end portion of the drain electrode and in contact with the oxide semiconductor layer after performing the first heat treatment; and forming a gate electrode overlapping with the end portion of the source electrode and the end portion of the drain electrode and in contact with the gate insulating layer. - View Dependent Claims (4, 6, 8, 10, 12)
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13. A semiconductor device comprising:
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a gate electrode over an insulating surface; a gate insulating layer over the insulating surface and the gate electrode; an oxide semiconductor layer having a halogen element over the gate insulating layer; a source electrode and a drain electrode over the gate insulating layer and the oxide semiconductor layer; and an insulating layer in contact with part of the oxide semiconductor layer and over the gate insulating layer, the oxide semiconductor layer, the source electrode, and the drain electrode, wherein a concentration of the halogen element is higher than or equal to 1015 atoms/cm3 and lower than or equal to 1018 atoms/cm3. - View Dependent Claims (15)
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14. A semiconductor device comprising:
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a source electrode and a drain electrode over an insulating surface; an oxide semiconductor layer having a halogen element over the insulating surface, the source electrode, and the drain electrode; a gate insulating layer over the insulating surface, the source electrode, the drain electrode, and the oxide semiconductor layer; and a gate electrode over the gate insulating layer, wherein a concentration of the halogen element is higher than or equal to 1015 atoms/cm3 and lower than or equal to 1018 atoms/cm3. - View Dependent Claims (16)
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Specification