SEMICONDUCTOR DEVICES WITH HETEROJUNCTION BARRIER REGIONS AND METHODS OF FABRICATING SAME
First Claim
Patent Images
1. An electronic device, comprising:
- a silicon carbide layer including an n-type drift region therein;
a contact forming a Schottky junction with the drift region; and
a p-type junction barrier region on the silicon carbide layer, the p-type junction barrier region including a p-type polysilicon region forming a P-N heterojunction with the drift region and the p-type junction barrier region being electrically connected to the contact.
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Abstract
An electronic device includes a silicon carbide layer including an n-type drift region therein, a contact forming a junction, such as a Schottky junction, with the drift region, and a p-type junction barrier region on the silicon carbide layer. The p-type junction barrier region includes a p-type polysilicon region forming a P-N heterojunction with the drift region, and the p-type junction barrier region is electrically connected to the contact. Related methods are also disclosed.
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Citations
28 Claims
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1. An electronic device, comprising:
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a silicon carbide layer including an n-type drift region therein; a contact forming a Schottky junction with the drift region; and a p-type junction barrier region on the silicon carbide layer, the p-type junction barrier region including a p-type polysilicon region forming a P-N heterojunction with the drift region and the p-type junction barrier region being electrically connected to the contact. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9)
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10. An electronic device, comprising:
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a drift region having a first conductivity type; a contact on the drift region and forming a junction with the drift region; and a junction barrier region on the drift region, the junction barrier region having a second conductivity type opposite the first conductivity type and including a heterojunction barrier region on the drift region, wherein the heterojunction barrier region forms a P-N heterojunction with the drift region and is in electrical contact with the contact. - View Dependent Claims (11, 12, 13, 14, 15, 16, 17, 18, 19, 20, 21)
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22. A method of forming an electronic device, comprising:
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providing a drift region having a first conductivity type; providing a heterojunction barrier region on the drift region, the heterojunction barrier region comprising a material different from the drift region and having a conductivity type opposite the conductivity type of the drift region and forming a P-N heterojunction with the drift region; and providing a contact on the drift region and on the heterojunction barrier region, the contact forming a Schottky junction with the drift region and forming an ohmic junction with the heterojunction barrier region. - View Dependent Claims (23, 24, 25)
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26. An electronic device, comprising:
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a silicon carbide layer including a drift region having a first conductivity type; a contact on a surface of the drift region and forming a junction with the drift region; and a guard ring in contact with the surface of the silicon carbide layer adjacent to the junction, the guard ring having a conductivity type opposite the conductivity type of the drift region and including a material forming a heterojunction with the silicon carbide layer. - View Dependent Claims (27, 28)
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Specification