MICROELECTRONIC WORKPIECE PROCESSING SYSTEMS AND ASSOCIATED METHODS OF COLOR CORRECTION

• US 20110217794A1
• Filed: 03/02/2010
• Published: 09/08/2011
• Est. Priority Date: 03/02/2010
• Status: Active Grant

• Current Assignee: Micron Technology, Inc.
• Original Assignee: Micron Technology, Inc.
• Inventors: Watkins, Charles M., Tetz, Kevin
• Granted Patent: US 8,716,038 B2
• Time in Patent Office: Days
• US Class Current: 438/16
• CPC Class Codes: B05C 11/00 Component parts, details or accessories not specifically provided for in groups B05C1/00 - B05C9/00 means for manipulating or holding work B05C13/00; enclosures for apparatus, booths B05C15/00; spray booths B05B16/00
• CPC Class Codes: H01L 2224/48091 Arched
• CPC Class Codes: H01L 2924/00 Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
• CPC Class Codes: H01L 2924/00014 the subject-matter covered by the group, the symbol of which is combined with the symbol of this group, being disclosed without further technical details
• CPC Class Codes: H01L 2933/0041 relating to wavelength conversion elements
• CPC Class Codes: H01L 33/005 Processes
• CPC Class Codes: H01L 33/504 Elements with two or more wavelength conversion materials

Abstract

Several embodiments of semiconductor systems and associated methods of color corrections are disclosed herein. In one embodiment, a method for producing a light emitting diode (LED) includes forming an (LED) on a substrate, measuring a base emission characteristic of the formed LED, and selecting a phosphor based on the measured base emission characteristic of the formed LED such that a combined emission from the LED and the phosphor at least approximates white light. The method further includes introducing the selected phosphor onto the LED via, for example, inkjet printing.

Claims

1. A method for producing a light emitting diode (LED), comprising:

forming an (LED) on a substrate;

measuring a base emission characteristic of the formed LED;

selecting a phosphor based on the measured base emission characteristic of the formed LED such that a combined emission from the LED is closer to white light than the reference emission characteristic; and

introducing the selected phosphor onto the LED.

2. The method of claim 1 wherein:

forming an (LED) on a substrate includes sequentially depositing an N-type GaN, InGaN, and P-type GaN onto a silicon substrate via epitaxial growth;

measuring a base emission characteristic of the formed LED includes measuring an emission wavelength of the LED with a peak intensity;

selecting a phosphor includes;

plotting the measured emission wavelength on a spectral locus of a chromaticity plot;

determining an emission point on a black body curve defined by the following;

3. The method of claim 1 wherein:

forming an (LED) on a substrate includes sequentially depositing an N-type GaN, InGaN, and P-type GaN onto a silicon substrate via epitaxial growth;

measuring a base emission characteristic of the formed LED includes measuring an emission wavelength of the LED with a peak intensity;

selecting a phosphor includes;

plotting the measured emission point of the LED on a spectral locus of a chromaticity plot;

determining an emission point on a black body curve defined by the following;

4. The method of claim 1 wherein:

forming an (LED) on a substrate includes sequentially depositing an N-type GaN, InGaN, and P-type GaN onto a silicon substrate via epitaxial growth;

measuring a base emission characteristic of the formed LED includes measuring at least one of an emission wavelength, an emission intensity, and an emission frequency;

selecting a phosphor includes selecting at least one of a composition, a concentration, and a quantity of a phosphor containing Cerium(III)-doped Yttrium Aluminum Garnet based on the measured emission characteristic of the formed LED and an operating temperature of the LED; and

introducing the selected phosphor includes introducing the selected phosphor onto the LED via inkjet printing.

5. The method of claim 1 wherein:

measuring a base emission characteristic of the formed LED includes measuring an emission wavelength of the LED with a peak intensity; and

selecting a phosphor includes empirically determining a ratio of at least two phosphors based on the measured emission characteristic of the formed LED such that a combined emission from the LED and the phosphors at least approximates a white light.

6. The method of claim 1 wherein:

measuring the base emission characteristic of the formed LED includes measuring an emission wavelength of the LED with a peak intensity; and

selecting a phosphor includes empirically determining a ratio of at least two phosphors based on the measured emission characteristic of the formed LED such that a combined emission from the LED and the phosphors at least approximates a white light.

7. The method of claim 1 wherein:

the LED is one of a plurality of LEDs on the substrate; and

the method further includes for each of the LEDs;

measuring the base emission characteristic of the LED on the substrate;

selecting a phosphor based on the measured emission characteristic of the LED such that a combined emission from the LED and the phosphor at least approximates a white light; and

introducing the selected phosphor onto the LED.

8. The method of claim 1 wherein:

the LED is one of a plurality of LEDs on the substrate;

the method further includes for each of the LEDs;

measuring the base emission characteristic of the LED on the substrate;

selecting a phosphor based on the measured emission characteristic of the LED such that a combined emission from the LED and the phosphor at least approximates a white light; and

introducing the selected phosphor onto the LED;

inspect emission characteristics of the plurality of LEDs with the introduced phosphors; and

repeating the measuring, selecting, and introducing operations until a variance in the emission characteristics of the plurality of LEDs is below a threshold.

9. A method of color correction of light emitting diodes (LEDs), comprising:

measuring a base emission characteristic of individual LEDs on a substrate;

developing an emission map of the LEDs on the substrate based on the measured base emission characteristics;

for the individual LEDs, determining at least one of a composition and a concentration of a converter material based on the emission map of the LEDs; and

introducing the selected phosphor onto the individual LEDs on the substrate.

10. The method of claim 9 wherein determining at least one of a composition and a concentration of a converter material includes determining at least one of a composition and a concentration of a phosphor such that a combined emission from the individual LEDs and the phosphor at least approximates a white light.

11. The method of claim 9 wherein measuring a base emission characteristic of individual LEDs on a substrate includes measuring an emission wavelength of each of the LEDs on a substrate.

12. The method of claim 9 wherein measuring a base emission characteristic of individual LEDs on a substrate includes measuring an emission wavelength of some of the LEDs on a substrate.

13. The method of claim 9 wherein developing an emission map includes organizing and storing the measured emission characteristic of the individual LEDs as individual records in a database.

14. The method of claim 9 wherein determining at least one of a composition and a concentration of a converter material includes determining a ratio of a first phosphor and a second phosphor.

15. The method of claim 9 wherein determining at least one of a composition and a concentration of a converter material includes looking up a recipe database based on the emission map, the recipe database containing records indicating at least one of a composition and a concentration of a phosphor based on the corresponding emission characteristic in the emission map.

16. The method of claim 9 wherein:

measuring a base emission characteristic of individual LEDs includes measuring an emission wavelength of the individual LEDs with a peak intensity; and

determining at least one of a composition and a concentration of a converter material includes looking up a recipe database based on the emission wavelength with the peak intensity for the individual LEDs, the recipe database containing records indicating at least one of a composition and a concentration of a phosphor based on the corresponding emission wavelength of the individual LEDs.

17. The method of claim 9 wherein:

measuring an emission characteristic of individual LEDs includes measuring an emission wavelength of the individual LEDs with a peak intensity; and

determining at least one of a composition and a concentration of a converter material includes looking up a recipe database based on the emission wavelength with the peak intensity for the individual LEDs, the recipe database containing records indicating (1) at least one of a composition and a concentration of first and second phosphors based on the corresponding emission wavelength of the individual LEDs; and

(2) a ratio of the first and second phosphors.

18. A system for processing a semiconductor substrate, comprising:

a substrate support configured to individually carry a microelectronic workpiece containing a plurality of light emitting diodes (LEDs);

a container holding a phosphor;

an injector operatively coupled to the container, the injector being configured to introduce a volume of the phosphor onto the individual LEDs of the microelectronic workpiece; and

a controller operatively coupled to the injector, the controller having a computer-readable storage medium containing instructions which, when executed, cause the controller to perform a method comprising;

receiving a base emission characteristic of the individual LEDs of the microelectronic workpiece;

adjusting a characteristic of the phosphor based on the received base emission characteristic of the individual LEDs; and

introducing the phosphor with the adjusted characteristic onto the individual LEDs.

19. The system of claim 18, further comprising a probe configured to measure the base emission characteristic of the individual LEDs of the microelectronic workpiece.

20. The system of claim 18, further comprising a probe configured to measure the base emission characteristic of the individual LEDs of the microelectronic workpiece, wherein the method further includes:

organizing and storing the measured emission characteristic of the individual LEDs in an emission map; and

receiving a base emission characteristic includes receiving an emission characteristic from the emission map.

21. The system of claim 18 wherein:

receiving a base emission characteristic includes receiving an emission characteristic from an emission map stored in the computer-readable storage medium of the controller; and

adjusting a characteristic of the phosphor includes determining at least one of a composition and a concentration from a recipe database based on the received emission characteristic of the individual LEDs.

22. The system of claim 18 wherein:

receiving a base emission characteristic includes receiving an emission characteristic from an emission map stored in the computer-readable storage medium of the controller; and

adjusting a characteristic of the phosphor includes determining (1) at least one of a composition and a concentration of a first phosphor and a second phosphor; and

(2) a ratio of the first and second phosphors from a recipe database based on the received emission characteristic of the individual LEDs.

23. A computer-readable medium containing a data structure, the data structure including:

a base emission wavelength;

a number of phosphors corresponding to the base emission wavelength; and

a ratio of the number of phosphors.

24. The computer-readable medium of claim 23 wherein

the number of phosphors includes at least two phosphors;

and

the ratio includes at least one of a mass ratio, a molar ratio, and a volume ratio of the number of phosphors.

25. The computer-readable medium of claim 23, further comprising a target emission.