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MOTION DETECTION USING CAPACITOR HAVING DIFFERENT WORK FUNCTION MATERIALS

  • US 20110219876A1
  • Filed: 03/10/2010
  • Published: 09/15/2011
  • Est. Priority Date: 03/10/2010
  • Status: Active Grant
First Claim
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1. A micro-electromechanical apparatus for detecting mechanical displacement comprising a capacitor having first and second capacitor plates spaced from one another, the first and second plates having different work functions and being electrically connected with each other, wherein the plates are movable with respect to one another such that a spacing between the plates changes in response to a force, a current through the capacitor being representative of a rate of change in the spacing between the plates at a given time.

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