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Anti-Capture Method and Apparatus for Micromachined Devices

  • US 20110221454A1
  • Filed: 05/23/2011
  • Published: 09/15/2011
  • Est. Priority Date: 06/11/2008
  • Status: Active Grant
First Claim
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1. An electrode driver comprising:

  • a detector for monitoring the output of a MEMS device to determine whether a beam displacement exceeds a threshold distance, the detector having a detector output; and

    a driver circuit capable of producing a plurality of electrode drive signals and having a driver circuit input and an electrode driver output, the driver circuit input coupled to the detector output.

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