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Systems, devices, and methods including a dark-field reflected-illumination apparatus

  • US 20110222059A1
  • Filed: 02/04/2011
  • Published: 09/15/2011
  • Est. Priority Date: 02/10/2010
  • Status: Active Grant
First Claim
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1. A dark-field detection system, comprising:

  • an illumination angle controller that modulates an angle of incidence of electromagnetic energy delivered by a dark-field illuminator, the dark-field illuminator oriented to focus electromagnetic energy onto at least one focal region of a sample, at one or more angles of incidence relative to an optical axis of an optical assembly;

    an aperture controller operably coupled to an aperture device, the aperture controller operable to modulate an effective numerical aperture associated with a collection zone of scattered electromagnetic energy from the sample interrogated by the electromagnetic energy delivered by the dark-field illuminator; and

    an illumination-collection separation controller operably coupled to the illumination angle controller and the aperture controller, the illumination-collection separation controller configured to vary an illumination-collection spacing, bounded in part by the electromagnetic energy delivered by the dark-field illuminator and the collection zone, by actuating at least one of the illumination angle controller or the aperture controller.

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