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ATOMIC LAYER DEPOSITION CHAMBER WITH MULTI INJECT

  • US 20110223334A1
  • Filed: 03/08/2011
  • Published: 09/15/2011
  • Est. Priority Date: 03/12/2010
  • Status: Active Grant
First Claim
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1. A chamber lid assembly comprising:

  • a channel having an upper portion and a lower portion, wherein the channel extends along a central axis;

    a housing having an inner region and at least partially defining two or more annular channels;

    an insert disposed in the inner region and defining the upper portion, the upper portion fluidly coupled with the two or more annular channels; and

    a tapered bottom surface extending from the bottom portion of the channel to a peripheral portion of the chamber lid assembly.

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