SEALING GLASS, GLASS MEMBER PROVIDED WITH SEALING MATERIAL LAYER, ELECTRONIC DEVICE AND PROCESS FOR PRODUCING IT
First Claim
1. A sealing glass comprising, as represented by mass percentage, from 70 to 90% of Bi2O3, from 1 to 20% of ZnO, from 2 to 12% of B2O3 and from 10 to 380 ppm of Na2O.
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Accused Products
Abstract
The bonding strength to a glass substrate comprising soda lime glass is increased with good reproducibility at a time of laser sealing, to improve the sealing ability and the reliability of an electronic device.
A glass substrate 3 has a sealing region. On the sealing region, a sealing material layer 5 is provided, which is a fired layer of a glass material for sealing containing a sealing glass, a low-expansion filler and a laser absorbent. The sealing glass contains, as represented by mass percentage, from 70 to 90% of Bi2O3, from 1 to 20% of ZnO, from 2 to 12% of B2O3 and from 10 to 380 ppm of Na2O. Such a glass substrate 3 and a glass substrate 2 having an element-formed region provided with an electronic element, are laminated, the sealing material layer 5 is irradiated with a laser light 6 to be melted to bond the glass substrates 2 and 3.
42 Citations
27 Claims
- 1. A sealing glass comprising, as represented by mass percentage, from 70 to 90% of Bi2O3, from 1 to 20% of ZnO, from 2 to 12% of B2O3 and from 10 to 380 ppm of Na2O.
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4. A glass member provided with a sealing material layer, which comprises a glass substrate comprising soda lime glass and having a sealing region;
- and a sealing material layer comprising a fired layer of a glass material for sealing containing a sealing glass, a low-expansion filler and a laser absorbent, provided on the sealing region of the glass substrate;
wherein the sealing glass comprises, as represented by mass percentage, from 70 to 90% of Bi2O3, from 1 to 20% of ZnO, from 2 to 12% of B2O3 and from 10 to 380 ppm of Na2O. - View Dependent Claims (6, 8, 10, 12)
- and a sealing material layer comprising a fired layer of a glass material for sealing containing a sealing glass, a low-expansion filler and a laser absorbent, provided on the sealing region of the glass substrate;
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5. A glass member provided with a sealing material layer, which comprises a glass substrate comprising alkali-free glass and having a sealing region;
- and a sealing material layer comprising a fired layer of a glass material for sealing containing a sealing glass, a low-expansion filler and a laser absorbent, provided on the sealing region of the glass substrate;
wherein the sealing glass comprises, as represented by mass percentage, from 70 to 90% of Bi2O3, from 1 to 20% of ZnO, from 2 to 12% of B2O3 and from 10 to 380 ppm of Na2O. - View Dependent Claims (7, 9, 11, 13)
- and a sealing material layer comprising a fired layer of a glass material for sealing containing a sealing glass, a low-expansion filler and a laser absorbent, provided on the sealing region of the glass substrate;
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14. An electronic device which comprises a first glass substrate comprising soda lime glass and having an element-formed region provided with an electronic element and a first sealing region provided on the outer peripheral side of the element-formed region;
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a second glass substrate comprising soda lime glass and having a second sealing region corresponding to the first sealing region of the first glass substrate; and a sealing layer comprising a melt-bonded layer of a glass material for sealing containing a sealing glass, a low-expansion filler and a laser absorbent, formed to seal a space between the first sealing region of the first glass substrate and the second sealing region of the second glass substrate while a space is provided on the element-formed region; wherein the sealing glass comprises, as represented by mass percentage, from 70 to 90% of Bi2O3, from 1 to 20% of ZnO, from 2 to 12% of B2O3 and from 10 to 380 ppm of Na2O. - View Dependent Claims (16, 18)
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15. An electronic device which comprises a first glass substrate comprising alkali-free glass and having an element-formed region provided with an electronic element and a first sealing region provided on the outer peripheral side of the element-formed region;
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a second glass substrate comprising alkali-free glass and having a second sealing region corresponding to the first sealing region of the first glass substrate; and a sealing layer comprising a melt-bonded layer of a glass material for sealing containing a sealing glass, a low-expansion filler and a laser absorbent, formed to seal a space between the first sealing region of the first glass substrate and the second sealing region of the second glass substrate while a space is provided on the element-formed region; wherein the sealing glass comprises, as represented by mass percentage, from 70 to 90% of Bi2O3, from 1 to 20% of ZnO, from 2 to 12% of B2O3 and from 10 to 380 ppm of Na2O. - View Dependent Claims (17, 19)
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20. A process for producing an electronic device, which comprises a step of preparing a first glass substrate comprising soda lime glass and having an element-formed region provided with an electronic element and a first sealing region provided on the outer peripheral side of the element-formed region;
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a step of preparing a second glass substrate comprising soda lime glass and having a second sealing region corresponding to the first sealing region of the first glass substrate and a sealing material layer comprising a fired layer of a glass material for sealing containing a sealing glass, a low-expansion filler and a laser absorbent, formed on the second sealing region; a step of laminating the first glass substrate and the second glass substrate via the sealing material layer while a space is formed on the element-formed region; and a step of irradiating the sealing material layer with a laser light through the second glass substrate to melt the sealing material layer thereby to form a sealing layer to seal the space between the first glass substrate and the second glass substrate; wherein the sealing glass comprises, as represented by mass percentage, from 70 to 90% of Bi2O3, from 1 to 20% of ZnO, from 2 to 12% of B2O3 and from 10 to 380 ppm of Na2O. - View Dependent Claims (22, 24, 26)
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21. A process for producing an electronic device, which comprises a step of preparing a first glass substrate comprising alkali-free glass and having an element-formed region provided with an electronic element and a first sealing region provided on the outer peripheral side of the element-formed region;
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a step of preparing a second glass substrate comprising alkali-free glass and having a second sealing region corresponding to the first sealing region of the first glass substrate and a sealing material layer comprising a fired layer of a glass material for sealing containing a sealing glass, a low-expansion filler and a laser absorbent, formed on the second sealing region; a step of laminating the first glass substrate and the second glass substrate via the sealing material layer while a space is formed on the element-formed region; and a step of irradiating the sealing material layer with a laser light through the second glass substrate to melt the sealing material layer thereby to form a sealing layer to seal the space between the first glass substrate and the second glass substrate; wherein the sealing glass comprises, as represented by mass percentage, from 70 to 90% of Bi2O3, from 1 to 20% of ZnO, from 2 to 12% of B2O3 and from 10 to 380 ppm of Na2O. - View Dependent Claims (23, 25, 27)
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Specification