SILICON NITRIDE PASSIVATION LAYER FOR COVERING HIGH ASPECT RATIO FEATURES
First Claim
1. A method of forming a passivation layer on features of a substrate, the passivation layer comprising a silicon nitride layer, and the method comprising:
- (a) providing a substrate having a plurality of features in a process zone;
(b) in a first stage, introducing into the process zone, a dielectric deposition gas comprising a silicon-containing gas and a nitrogen-containing gas, and energizing the dielectric deposition gas to deposit a silicon nitride layer on the features;
(c) in a second stage, introducing into the process zone, a treatment gas having a different composition than the dielectric deposition gas, and energizing the treatment gas to treat the silicon nitride layer; and
(d) performing the first and second stages a plurality of times.
1 Assignment
0 Petitions
Accused Products
Abstract
A method of forming a passivation layer comprising silicon nitride on features of a substrate is described. In a first stage of the deposition method, a dielectric deposition gas, comprising a silicon-containing gas and a nitrogen-containing gas, is introduced into the process zone and energized to deposit a silicon nitride layer. In a second stage, a treatment gas, having a different composition than that of the dielectric deposition gas, is introduced into the process zone and energized to treat the silicon nitride layer. The first and second stages can be performed a plurality of times.
-
Citations
23 Claims
-
1. A method of forming a passivation layer on features of a substrate, the passivation layer comprising a silicon nitride layer, and the method comprising:
-
(a) providing a substrate having a plurality of features in a process zone; (b) in a first stage, introducing into the process zone, a dielectric deposition gas comprising a silicon-containing gas and a nitrogen-containing gas, and energizing the dielectric deposition gas to deposit a silicon nitride layer on the features; (c) in a second stage, introducing into the process zone, a treatment gas having a different composition than the dielectric deposition gas, and energizing the treatment gas to treat the silicon nitride layer; and (d) performing the first and second stages a plurality of times. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12, 13, 14, 15, 16, 17, 18, 19, 20, 21, 22, 23)
-
Specification