METHOD AND APPARATUS FOR MANUFACTURING SEMICONDUCTOR DEVICE
First Claim
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1. A semiconductor device manufacturing method comprising:
- irradiating an insulating film including a siloxane bond with an energy beam or plasma; and
exposing the insulating film to a gas including at least one element selected from the group consisting of hydrogen, carbon, nitrogen and silicon excluding N2 or H2O gases,wherein said exposing the insulating film to the gas is finished before a time point when a relative permittivity of the insulating film first ascends after the relative permittivity descends by said exposing the insulating film to the gas.
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Abstract
A method for manufacturing a semiconductor device includes: exposing an insulating film including a siloxane bond to an energy beam or plasma; and exposing the insulating film to a gas (excluding N2 and H2O gases) including at least one element selected from the group consisting of hydrogen, carbon, nitrogen and silicon, as an constituent element, wherein, in the exposing to the gas, after a relative permittivity of the insulating film descends by the exposing the insulating film to the gas, the exposing is completed before a time point when the relative permittivity of the insulating film first ascends.
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Citations
17 Claims
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1. A semiconductor device manufacturing method comprising:
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irradiating an insulating film including a siloxane bond with an energy beam or plasma; and exposing the insulating film to a gas including at least one element selected from the group consisting of hydrogen, carbon, nitrogen and silicon excluding N2 or H2O gases, wherein said exposing the insulating film to the gas is finished before a time point when a relative permittivity of the insulating film first ascends after the relative permittivity descends by said exposing the insulating film to the gas. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12, 13)
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14. A semiconductor device manufacturing method comprising:
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cutting a bond of an insulating film including a siloxane bond; and exposing the insulating film to a gas including at least one element selected from the group consisting of hydrogen, carbon, nitrogen and silicon excluding nitrogen or H2O gases, wherein said exposing the insulating film to the gas is finished before a time point when a relative permittivity of the insulating film first ascends after the relative permittivity descends by the exposing the insulating film to the gas.
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15. A semiconductor device manufacturing apparatus comprising:
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a processing room including a generation device configured to generate an energy beam or plasma to which an insulating film is irradiated; and a gas introduction device configured to introduce a gas including at least one element selected from the group consisting of hydrogen, carbon, nitrogen and silicon excluding N2 or H2O gases to the processing room, wherein the gas introduction device is configured to finish introducing the gas before a time point when a relative permittivity of the insulating film first ascends after the relative permittivity of the insulating film descends. - View Dependent Claims (16, 17)
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Specification