Fixed-spindle floating-platen workpiece loader apparatus

• US 20110223837A1
• Filed: 09/14/2010
• Published: 09/15/2011
• Est. Priority Date: 03/12/2010
• Status: Active Grant

• Current Assignee: Wayne O. Duescher
• Original Assignee: Wayne O. Duescher
• Inventors: Duescher, Wayne O.
• Granted Patent: US 8,647,171 B2
• Time in Patent Office: Days
• US Class Current: 451/28
• CPC Class Codes: B24B 37/107 in a rotary movement only, about an axis being stationary during lapping
• CPC Class Codes: B24B 37/345 Feeding, loading or unloading work specially adapted to lapping

Abstract

A method and apparatus for robotic devices that can be used to load and remove workpieces and abrasive disks for an abrading system having a floating, rotatable abrading platen that is three-point supported by annular, flat abrading-surface of the floating platen. The rotary spindles are mounted on the flat horizontal surface of a machine base and the spindle-top flat surfaces are aligned to be precisely co-planar with each other where the rotational-centers of each of the spindles fixed-position rotary flat-surfaced spindles. The flexible abrasive disks are releasably attached to the are positioned at the center of the annular radial-width of the platen abrading-surface. Flat-surfaced workpieces are attached to the spindle-top flat surfaces and the abrasive surface of the abrasive disk that is attached to the rotating floating-platen abrading surface contacts the workpieces to perform single-sided abrading on the workpieces. Workpieces can be flat-lapped to provide precision-flat and smoothly-polished surfaces.

Claims

1. An automated robotic workpiece loading apparatus that can selectively install and remove workpieces to and from an at least three-point fixed-spindle floating-platen abrading machine apparatus, the automated workpiece loading apparatus comprising:

a) at least three rotary spindles having circular rotatable flat-surfaced spindle-tops that each have a spindle-top axis of rotation at a center of a respective rotatable flat-surfaced spindle-top for respective rotary spindles;

b) wherein the at least three spindle-tops'"'"' axes of rotation are perpendicular to the respective rotatable flat-surfaced spindle-tops'"'"' flat surfaces;

c) an abrading machine base having a horizontal flat top surface and a spindle-circle where the spindle-circle is coincident with the abrading machine base flat top surface;

d) wherein the at least three rotary spindles are located with equal spaces between each of them and the spindle-tops'"'"' axes of rotation intersect the machine base spindle-circle, and the at least three rotary spindles are attached to the machine base top surface at those machine base spindle-circle locations;

e) wherein the at least three spindle-tops'"'"' flat surfaces are aligned to be co-planar with each other;

f) a floating, rotatable abrading platen having a precision-flat annular abrading-surface that has an annular abrading-surface radial width and an annular abrading-surface inner radius and an annular abrading-surface outer radius and where the floating, rotatable abrading platen is supported by and is rotationally driven about an abrading platen rotation axis located at a rotational center of the floating, rotatable abrading platen by a spherical-action rotation device located at a rotational center of the floating, rotatable abrading platen and where the floating, rotatable abrading platen spherical-action rotation device restrains the floating, rotatable abrading platen in a radial direction relative to the floating, rotatable abrading platen axis of rotation and where the floating, rotatable abrading platen axis of rotation is concentric with the machine base spindle-circle;

g) wherein the floating, rotatable abrading platen spherical-action rotation device allows spherical motion of the floating, rotatable abrading platen about the floating, rotatable abrading platen rotational center where a precision-flat annular abrading-surface of the floating, rotatable abrading platen that is supported by the floating, rotatable abrading platen spherical-action rotation device is nominally horizontal; and

h) flexible abrasive disk articles having annular bands of abrasive coated surfaces that have an abrasive coated surface annular band radial width and an abrasive coated surface annular band inner radius and an abrasive coated surface annular band outer radius where a flexible abrasive disk is attached in flat conformal contact with an floating, rotatable abrading platen precision-flat annular abrading-surface such that the attached abrasive disk is concentric with the floating, rotatable abrading platen precision-flat annular abrading-surface wherein the floating, rotatable abrading platen precision-flat annular abrading-surface radial width is at least equal to the radial width of the attached flexible abrasive disk'"'"'s abrasive coated annular abrading band and wherein the floating, rotatable abrading platen precision-flat annular abrading-surface provides conformal support of the full-abrasive-surface of the flexible abrasive disk'"'"'s abrasive coated surface annular band where the floating, rotatable abrading platen precision-flat annular abrading-surface inner radius is less than the inner radius of the attached flexible abrasive disk'"'"'s abrasive coated surface annular band and where the floating, rotatable abrading platen precision-flat annular abrading-surface outer radius is greater than the outer radius of the attached flexible abrasive disk'"'"'s abrasive coated surface annular band;

i) wherein each flexible abrasive disk is attached in flat conformal contact with the floating, rotatable abrading platen precision-flat annular abrading-surface by a disk attachment technique selected from the group consisting of vacuum disk attachment techniques, mechanical disk attachment techniques and adhesive disk attachment techniques;

j) wherein approximately equal thickness workpieces having parallel or near-parallel opposed flat workpiece top surfaces and flat workpiece bottom surfaces are attached in flat-surfaced contact with the flat surfaces of the respective at least three spindle-tops where the workpiece bottom surfaces contact the flat surfaces of the respective at least three spindle-tops;

k) wherein the floating, rotatable abrading platen is moveable vertically along the floating, rotatable abrading platen rotation axis by the floating, rotatable abrading platen spherical-action rotation device to allow the abrasive surface of the flexible abrasive disk that is attached to the floating, rotatable abrading platen precision-flat annular abrading-surface to contact the top surfaces of the workpieces that are attached to the flat surfaces of the respective at least three spindle-tops wherein the at least three rotary spindles provide at least three-point support of the floating, rotatable abrading platen; and

l) wherein the total floating, rotatable abrading platen abrading contact force applied to workpieces that are attached to the respective at least three spindle-top flat surfaces by contact of the abrasive surface of the flexible abrasive disk that is attached to the floating, rotatable abrading platen precision-flat annular abrading-surface with the top surfaces of the workpieces that are attached to the flat surfaces of the respective at least three spindle-tops is controlled through the abrading platen spherical-action floating, rotatable abrading platen rotation device to allow the total abrading platen abrading contact force to be evenly distributed to the workpieces attached to the respective at least three spindle-tops;

m) wherein the at least three spindle-tops having the attached approximately equal thickness workpieces can be rotated about the respective spindle-tops'"'"' rotation axes and the floating, rotatable abrading platen having the attached flexible abrasive disk can be rotated about the floating, rotatable abrading platen rotation axis to single-side abrade the approximately equal thickness workpieces that are attached to the flat surfaces of the at least three spindle-tops while the moving abrasive surface of the flexible abrasive disk that is attached to the moving floating, rotatable abrading platen precision-flat annular abrading-surface is in force-controlled abrading contact with the top surfaces of the approximately equal thickness workpieces that are attached to the respective at least three spindle-tops and where the floating, rotatable abrading platen precision-flat annular abrading-surface assumes a co-planar alignment with the precisely co-planar flat surfaces of the respective at least three spindle-tops;

n) an automated robotic device that can sequentially transport and install flat-surfaced workpieces on the top flat surface on all of at least three spindle-top flat surfaces by picking individual workpieces from a corresponding workpiece storage device and transporting the individual workpieces to spindle-tops where the individual workpieces are positioned concentrically with the rotational centers of the respective rotatable spindle-tops and wherein the workpieces are attached to the respective spindle-tops for abrading action on the workpieces'"'"' flat surfaces by the abrading machine apparatus; and

o) wherein the same automated robotic device can sequentially remove selected flat-surfaced workpieces from the top flat surfaces of all three spindle-tops by picking the individual workpieces from the spindle-tops and transporting them to a corresponding workpiece storage device for storage.

2. The apparatus of claim 1 wherein the robotic workpiece loading apparatus is adapted to selectively install and remove workpieces to and from an at least three-point fixed-spindle floating-platen abrading machine apparatus having a machine base that has a precision-flat surface where the at least three equal-height rotary spindles are mechanically attached to the machine base precision-flat top surface at respective at least three rotary spindles'"'"' spindle-circle locations wherein the at least three spindle-tops'"'"' flat surfaces are aligned to be co-planar with each other.

3. The apparatus of claim 1 wherein the robotic workpiece loading apparatus is adapted to selectively install and remove workpieces to and from an at least three-point fixed-spindle floating-platen abrading machine apparatus having a machine base that has a nominally-flat surface where the at least three rotary spindles are mechanically attached to the machine base nominally-flat top surface at respective at least three rotary spindles'"'"' spindle-circle locations by respective at least three rotary spindle-support adjustable-height mounting legs that are approximately equally spaced around the outer periphery of the rotary spindles to form at least three-point support of the at least three rotary spindles and wherein the at least three spindle-tops'"'"' flat surfaces are aligned to be co-planar with each other.

4. The apparatus of claim 1 wherein the robotic workpiece loading apparatus is adapted to selectively install and remove workpieces to and from an at least three-point fixed-spindle floating-platen abrading machine apparatus comprising:

a) a machine base having a nominally-flat surface;

b) rotary spindle two-piece spindle-mount devices consisting essentially of a rotatable spindle-mount spherical-action rotor and a stationary spindle-mount spherical-base where both the rotatable spindle-mount spherical-action rotor and the stationary spindle-mount spherical-base have a common-radius spherical-joint wherein the rotatable spindle-mount spherical-action rotors are mounted in common-radius spherical-joint surface contact with respective stationary spindle-mount spherical-bases and wherein the rotatable spindle-mount spherical-action rotors are supported by the respective stationary spindle-mount spherical-bases where each rotary spindle two-piece spindle-mount device allows the rotatable spindle-mount spherical-action rotors to be rotated through spherical angles relative to the respective stationary spindle-mount spherical-bases and wherein the at least three rotary spindles are mechanically attached to respective at least three rotary spindle two-piece spindle-mount devices'"'"' rotatable spindle-mount spherical-action rotors and wherein rotary spindle two-piece spindle-mount devices'"'"' locking devices are able to lock the respective rotatable spindle-mount spherical-action rotors to the respective stationary spindle-mount spherical-bases;

c) wherein the at least three rotary spindles are located with approximately equal spacing between the at least three of the rotary spindles and the at least three spindle-tops'"'"' axes of rotation intersect the machine base spindle-circle and where the respective at least three rotary spindle two-piece spindle-mount devices'"'"' spindle-mount spherical-bases are mechanically attached to the machine base nominally-flat top surface at respective at least three rotary spindles'"'"' spindle-circle locations;

d) wherein the at least three spindle-tops'"'"' flat surfaces are aligned to be co-planar with respect to each other by spherical rotation of the rotatable spindle-mount spherical-action rotors relative to the respective stationary spindle-mount spherical-bases;

e) wherein rotary spindle two-piece spindle-mount devices'"'"' locking devices are adapted to lock the respective rotatable spindle-mount spherical-action rotors to the respective stationary spindle-mount spherical-bases to maintain the co-planar alignment of the at least three spindle-tops'"'"' flat surfaces.

5. The apparatus of claim 1 wherein the at least three rotary spindles are air bearing rotary spindles.

6. A process of a robotic workpiece loading apparatus selectively installing and removing workpieces to and from an at least three-point fixed-spindle floating-platen abrading machine apparatus comprising:

a) providing at least three rotary spindles having circular rotatable flat-surfaced spindle-tops that each have a spindle-top axis of rotation at a center of a respective rotatable flat-surfaced spindle-top for respective rotary spindles;

b) wherein the at least three spindle-tops'"'"' axes of rotation are perpendicular to the respective spindle-tops'"'"' flat surfaces;

c) providing an abrading machine base having a horizontal flat top surface and a spindle-circle where the spindle-circle is coincident with the machine base flat top surface; and

wherein the at least three rotary spindles are located with equal spacing among each of them and the at least three spindle-tops'"'"' axes of rotation intersect the machine base spindle-circle and the rotary spindles are attached to the machine base top surface at those spindle-circle locations; and

wherein that the at least three spindle-tops'"'"' flat surfaces are aligned to be co-planar with each other;

d) providing a floating, rotatable abrading platen having a precision-flat annular abrading-surface that has an annular abrading-surface radial width and an annular abrading-surface inner radius and an annular abrading-surface outer radius and where the abrading platen is supported by and is rotationally driven about an abrading platen rotation axis located at a rotational center of the abrading platen by a spherical-action rotation device located at the rotational center of the abrading platen and where the abrading platen spherical-action rotation device restrains the abrading platen in a radial direction relative to the abrading platen axis of rotation and where the abrading platen axis of rotation is concentric with the machine base spindle-circle;

e) the abrading platen spherical-action rotation device spherically moves the abrading platen about the abrading platen rotational center where the precision-flat annular abrading-surface of the abrading platen that is supported by the abrading platen spherical-action rotation device is nominally horizontal; and

f) providing flexible abrasive disk articles having annular bands of abrasive coated surfaces that have an abrasive coated surface annular band radial width and an abrasive coated surface annular band inner radius and an abrasive coated surface annular band outer radius where a selected flexible abrasive disk is attached in flat conformal contact with an abrading platen precision-flat annular abrading-surface such that the attached abrasive disk is concentric with the abrading platen precision-flat annular abrading-surface wherein the abrading platen precision-flat annular abrading-surface radial width is at least equal to the radial width of the attached flexible abrasive disk'"'"'s abrasive coated annular abrading band and wherein the abrading platen precision-flat annular abrading-surface provides conformal support of the full-abrasive-surface of the flexible abrasive disk'"'"'s abrasive coated surface annular band where the abrading platen precision-flat annular abrading-surface inner radius is less than the inner radius of the attached flexible abrasive disk'"'"'s abrasive coated surface annular band and where the abrading platen precision-flat annular abrading-surface outer radius is greater than the outer radius of the attached flexible abrasive disk'"'"'s abrasive coated surface annular band;

g) wherein each flexible abrasive disk is attached in flat conformal contact with the abrading platen precision-flat annular abrading-surface by a disk attachment technique selected from the group consisting of vacuum disk attachment techniques, mechanical disk attachment techniques and adhesive disk attachment techniques;

h) providing approximately equal thickness workpieces having parallel or near-parallel opposed flat workpiece top surfaces and flat workpiece bottom surfaces that are attached in flat-surfaced contact with the flat surfaces of the respective at least three spindle-tops where the workpiece bottom surfaces contact the flat surfaces of the respective at least three spindle-tops;

i) moving the abrading platen vertically along the abrading platen rotation axis by the abrading platen spherical-action rotation device to contact the abrasive surface of the flexible abrasive disk that is attached to the abrading platen precision-flat annular abrading-surface to the top surfaces of the workpieces that are attached to the flat surfaces of the respective at least three spindle-tops wherein the at least three rotary spindles provide at least three-point support of the abrading platen; and

j) applying a total abrading platen abrading contact force to workpieces that are attached to the respective at least three spindle-top flat surfaces by contact of the abrasive surface of the flexible abrasive disk that is attached to the abrading platen precision-flat annular abrading-surface with the top surfaces of the workpieces that are attached to the flat surfaces of the respective at least three spindle-tops is controlled through the abrading platen spherical-action abrading platen rotation device to allow the total abrading platen abrading contact force to be evenly distributed to the workpieces attached to the respective at least three spindle-tops;

k) wherein the at least three spindle-tops having the attached approximately equal thickness workpieces are rotated about the respective spindle-tops'"'"' rotation axes and the abrading platen having the attached flexible abrasive disk are rotated about the abrading platen rotation axis to single-side abrade the approximately equal thickness workpieces that are attached to the flat surfaces of the at least three spindle-tops while the moving abrasive surface of the flexible abrasive disk that is attached to the moving abrading platen precision-flat annular abrading-surface is in force-controlled abrading contact with the top surfaces of the approximately equal thickness workpieces that are attached to the respective at least three spindle-tops and where the abrading platen precision-flat annular abrading-surface assumes a co-planar alignment with the precisely co-planar flat surfaces of the respective at least three spindle-tops;

l) sequentially transporting and installing flat-surfaced workpieces on the top flat surface on all of at least three spindle-top flat surfaces with an automatic robot by picking individual workpieces from a corresponding workpiece storage device and transporting them to selected rotary spindles'"'"' spindle-tops;

m) positioning the individual workpieces concentrically with the rotational centers of the respective rotatable spindle-tops and attaching the workpieces to the respective spindle-tops to abrade the workpieces'"'"' flat surfaces by the abrading machine apparatus; and

n) wherein the automated robot sequentially removes flat-surfaced workpieces from the top flat surfaces of all three spindle-tops by picking the individual workpieces from selected spindle-tops and transporting them to a corresponding workpiece storage device for storage.

7. The process of claim 6 wherein the robotic workpiece loading apparatus selectively installs and removes workpieces to and from an at least three-point fixed-spindle floating-platen abrading machine apparatus having a machine base that has a precision-flat surface where the at least three equal-height rotary spindles are mechanically attached to the machine base precision-flat top surface at those respective at least three rotary spindles'"'"' spindle-circle locations wherein the at least three spindle-tops'"'"' flat surfaces are aligned to be co-planar with each other.

8. The process of claim 6 wherein the robotic workpiece loading apparatus selectively installs and removes workpieces to and from an at least three-point fixed-spindle floating-platen abrading machine apparatus having a machine base that has a nominally-flat surface where the at least three rotary spindles are mechanically attached to the machine base nominally-flat top surface at those respective at least three rotary spindles'"'"' spindle-circle locations by respective at least three rotary spindle-support adjustable-height mounting legs that are approximately equally spaced around the outer periphery of the rotary spindles to form at least three-point support of the at least three rotary spindles and wherein the at least three spindle-tops'"'"' flat surfaces are aligned to be co-planar with each other.

9. The process of claim 6 wherein the robotic workpiece loading apparatus selectively installs and removes workpieces to and from an at least three-point fixed-spindle floating-platen abrading machine apparatus comprising:

a) a machine base having a nominally-flat surface;

b) rotary spindle two-piece spindle-mount devices consisting of a rotatable spindle-mount spherical-action rotor and a stationary spindle-mount spherical-base where both have a common-radius spherical-joint wherein the rotatable spindle-mount spherical-action rotors are mounted in common-radius spherical-joint surface contact with respective stationary spindle-mount spherical-bases and wherein the rotatable spindle-mount spherical-action rotors are supported by the respective stationary spindle-mount spherical-bases where each rotary spindle two-piece spindle-mount device allows the rotatable spindle-mount spherical-action rotors to be rotated through spherical angles relative to the respective stationary spindle-mount spherical-bases and wherein the at least three rotary spindles are mechanically attached to respective at least three rotary spindle two-piece spindle-mount devices'"'"' rotatable spindle-mount spherical-action rotors and wherein rotary spindle two-piece spindle-mount devices'"'"' locking devices lock the respective rotatable spindle-mount spherical-action rotors to the respective stationary spindle-mount spherical-bases;

c) wherein the at least three rotary spindles are located with near-equal spacing between the at least three of the rotary spindles and that the at least three spindle-tops'"'"' axes of rotation intersect the machine base spindle-circle and where the respective at least three rotary spindle two-piece spindle-mount devices'"'"' spindle-mount spherical-bases are mechanically attached to the machine base nominally-flat top surface at those respective at least three rotary spindles'"'"' spindle-circle locations;

d) wherein the at least three spindle-tops'"'"' flat surfaces are aligned to be co-planar with each other by spherical rotation of the rotatable spindle-mount spherical-action rotors relative to the respective stationary spindle-mount spherical-bases;

e) wherein rotary spindle two-piece spindle-mount devices'"'"' locking devices lock the respective rotatable spindle-mount spherical-action rotors to the respective stationary spindle-mount spherical-bases to structurally maintain the co-planar alignment of the at least three spindle-tops'"'"' flat surfaces.

10. The process of claim 6 wherein the at least three rotary spindles are air bearing rotary spindles.

11. An automated robotic abrasive disk loading apparatus adapted to selectively install and remove abrasive disks to and from a platen of an at least three-point fixed-spindle floating-platen abrading machine assembly apparatus comprising:

a) an at least three rotary spindles having circular rotatable flat-surfaced spindle-tops that each have a spindle-top axis of rotation at the center of a respective rotatable flat-surfaced spindle-top for respective rotary spindles;

b) wherein the at least three spindle-tops'"'"' axes of rotation are perpendicular to the respective spindle-tops'"'"' flat surfaces;

c) an abrading machine base having a horizontal flat top surface and a spindle-circle where the spindle-circle is coincident with the machine base flat top surface;

d) wherein the at least three rotary spindles are located with equal spacing between each of them and the spindle-tops'"'"' axes of rotation intersect the machine base spindle-circle and the rotary spindles are attached to the machine base top surface at those spindle-circle locations;

e) wherein the at least three spindle-tops'"'"' flat surfaces are aligned to be co-planar with each other;

f) a floating, rotatable abrading platen having a precision-flat annular abrading-surface that has an annular abrading-surface radial width and an annular abrading-surface inner radius and an annular abrading-surface outer radius and where the floating, rotatable abrading platen is supported by and is rotationally driven about a floating, rotatable abrading platen rotation axis located at a rotational center of the floating, rotatable abrading platen by a spherical-action rotation device located at the rotational center of the floating, rotatable abrading platen and where the floating, rotatable abrading platen spherical-action rotation device restrains the floating, rotatable abrading platen in a radial direction relative to the floating, rotatable abrading platen axis of rotation and where the floating, rotatable abrading platen axis of rotation is concentric with the machine base spindle-circle;

g) wherein the floating, rotatable abrading platen spherical-action rotation device allows spherical motion of the floating, rotatable abrading platen about the floating, rotatable abrading platen rotational center where the precision-flat annular abrading-surface of the floating, rotatable abrading platen that is supported by the floating, rotatable abrading platen spherical-action rotation device is nominally horizontal; and

h) flexible abrasive disk articles having annular bands of abrasive coated surfaces that have an abrasive coated surface annular band radial width and an abrasive coated surface annular band inner radius and an abrasive coated surface annular band outer radius where the selected flexible abrasive disk is attached in flat conformal contact with a floating, rotatable abrading platen precision-flat annular abrading-surface such that the attached abrasive disk is concentric with the floating, rotatable abrading platen precision-flat annular abrading-surface wherein the floating, rotatable abrading platen precision-flat annular abrading-surface radial width is at least equal to the radial width of the attached flexible abrasive disk'"'"'s abrasive coated annular abrading band and wherein the floating, rotatable abrading platen precision-flat annular abrading-surface provides conformal support of the full-abrasive-surface of the flexible abrasive disk'"'"'s abrasive coated surface annular band where the floating, rotatable abrading platen precision-flat annular abrading-surface inner radius is less than the inner radius of the attached flexible abrasive disk'"'"'s abrasive coated surface annular band and where the floating, rotatable abrading platen precision-flat annular abrading-surface outer radius is greater than the outer radius of the attached flexible abrasive disk'"'"'s abrasive coated surface annular band;

i) wherein each flexible abrasive disk is attached in flat conformal contact with the floating, rotatable abrading platen precision-flat annular abrading-surface by a disk attachment technique selected from the group consisting of vacuum disk attachment techniques, mechanical disk attachment techniques and adhesive disk attachment techniques;

j) approximately equal thickness workpieces having parallel or near-parallel opposed flat workpiece top surfaces and flat workpiece bottom surfaces are attached in flat-surfaced contact with the flat surfaces of the respective at least three spindle-tops where the workpiece bottom surfaces contact the flat surfaces of the respective at least three spindle-tops;

k) wherein the floating, rotatable abrading platen can be moved vertically along the abrading platen rotation axis by the floating, rotatable abrading platen spherical-action rotation device to allow the abrasive surface of the flexible abrasive disk that is attached to the floating, rotatable abrading platen precision-flat annular abrading-surface to contact the top surfaces of the workpieces that are attached to the flat surfaces of the respective at least three spindle-tops wherein the at least three rotary spindles provide at least three-point support of the floating, rotatable abrading platen; and

l) wherein a total floating, rotatable abrading platen abrading contact force applied to equal thickness workpieces that are attached to the respective at least three spindle-top flat surfaces by contact of the abrasive surface of the flexible abrasive disk that is attached to the floating, rotatable abrading platen precision-flat annular abrading-surface with the top surfaces of the workpieces that are attached to the flat surfaces of the respective at least three spindle-tops is controlled through the floating, rotatable abrading platen spherical-action abrading platen rotation device to allow the total floating, rotatable abrading platen abrading contact force to be evenly distributed to the workpieces attached to the respective at least three spindle-tops;

m) wherein the at least three spindle-tops having the attached approximately equal thickness workpieces can be rotated about the respective spindle-tops'"'"' rotation axes and the floating, rotatable abrading platen having the attached flexible abrasive disk can be rotated about the floating, rotatable abrading platen rotation axis to single-side abrade the approximately equal thickness workpieces attached to the flat surfaces of the at least three spindle-tops while the moving abrasive surface of the flexible abrasive disk that is attached to the moving floating, rotatable abrading platen precision-flat annular abrading-surface is in force-controlled abrading contact with the top surfaces of the approximately equal thickness workpieces that are attached to the respective at least three spindle-tops and where the floating, rotatable abrading platen precision-flat annular abrading-surface assumes a co-planar alignment with the precisely co-planar flat surfaces of the respective at least three spindle-tops;

n) an automated robotic device that can install abrasive disks comprising flexible abrasive disks, flexible raised-island abrasive disks, flexible abrasive disks having attached solid abrasive pellets, chemical mechanical planarization resilient disk pads, shallow-island abrasive disks, flat-surfaced slurry abrasive plate disks, non-abrasive cloth or material pads where the selected abrasive disks are attached to the floating, rotatable platen flat-surfaced abrading surface by selecting individual abrasive disks from a corresponding abrasive disk storage device and transporting it to the floating, rotatable platen abrading surface where an individual selected disk is positioned concentrically with the rotational center of the floating, rotatable abrading platen and the flexible abrasive disk is pressed conformably against the abrading surface of the floating, rotatable abrading platen wherein the abrasive disk is attached to the floating, rotatable abrading platen abrading surface with vacuum for abrading action on the workpieces by the abrading machine apparatus;

o) and the automated robotic device sequentially removes selected abrasive disk from the flat abrading surface of the platen by picking the abrasive disk from the platen after the abrasive disk attachment vacuum is released and transporting the abrasive disk to an abrasive disk storage device for storage.

12. The apparatus of claim 11 wherein the robotic abrasive disk loading apparatus is adapted to selectively install and remove abrasive disks to and from a platen of an at least three-point fixed-spindle floating-platen abrading machine apparatus having a machine base that has a precision-flat surface where the at least three equal-height rotary spindles are mechanically attached to the machine base precision-flat top surface at respective at least three rotary spindles'"'"' spindle-circle locations wherein the at least three spindle-tops'"'"' flat surfaces are aligned to be co-planar with each other.

13. The apparatus of claim 11 wherein the robotic abrasive disk loading apparatus is adapted to selectively install and remove abrasive disks to and from a platen of an at least three-point fixed-spindle floating-platen abrading machine apparatus having a machine base that has a nominally-flat surface where the at least three rotary spindles are mechanically attached to the machine base nominally-flat top surface at those respective at least three rotary spindles'"'"' spindle-circle locations by respective at least three rotary spindle-support adjustable-height mounting legs that are approximately equally spaced around the outer periphery of the rotary spindles to form at least three-point support of the at least three rotary spindles and wherein the at least three spindle-tops'"'"' flat surfaces are aligned to be co-planar with each other.

14. The apparatus of claim 11 wherein the robotic abrasive disk loading apparatus is adapted to selectively install and remove abrasive disks to and from a floating, rotatable abrading platen of an at least three-point fixed-spindle floating-platen abrading machine apparatus comprising:

a) a machine base having a nominally-flat surface;

b) rotary spindle two-piece spindle-mount devices consisting essentially of a rotatable spindle-mount spherical-action rotor and a stationary spindle-mount spherical-base where both have a common-radius spherical-joint wherein the rotatable spindle-mount spherical-action rotors are mounted in common-radius spherical-joint surface contact with respective stationary spindle-mount spherical-bases and wherein the rotatable spindle-mount spherical-action rotors are supported by the respective stationary spindle-mount spherical-bases where each rotary spindle two-piece spindle-mount device allows the rotatable spindle-mount spherical-action rotors to be rotated through spherical angles relative to the respective stationary spindle-mount spherical-bases and wherein the at least three rotary spindles are mechanically attached to respective at least three rotary spindle two-piece spindle-mount devices'"'"' rotatable spindle-mount spherical-action rotors and wherein rotary spindle two-piece spindle-mount devices'"'"' locking devices are adapted to lock the respective rotatable spindle-mount spherical-action rotors to respective stationary spindle-mount spherical-bases;

c) wherein the at least three rotary spindles are located with approximately equal spacing between the at least three of the rotary spindles and the at least three spindle-tops'"'"' axes of rotation intersect the machine base spindle-circle and where the respective at least three rotary spindle two-piece spindle-mount devices'"'"' spindle-mount spherical-bases are mechanically attached to the machine base nominally-flat top surface at respective at least three rotary spindles'"'"' spindle-circle locations;

d) wherein the at least three spindle-tops'"'"' flat surfaces are adapted to be aligned to be co-planar with each other by spherical rotation of the rotatable spindle-mount spherical-action rotors relative to the respective stationary spindle-mount spherical-bases;

e) wherein rotary spindle two-piece spindle-mount devices'"'"' locking devices lock the respective rotatable spindle-mount spherical-action rotors to the respective stationary spindle-mount spherical-bases to structurally maintain the co-planar alignment of the at least three spindle-tops'"'"' flat surfaces.

15. The apparatus of claim 11 wherein the at least three rotary spindles are air bearing rotary spindles.

16. A process of an automated robotic abrasive disk loading apparatus selectively installing and removing abrasive disks to and from a platen of an at least three-point fixed-spindle floating-platen abrading machine assembly apparatus comprising:

a) providing at least three rotary spindles having circular rotatable flat-surfaced spindle-tops that each have a spindle-top axis of rotation at a center of a respective rotatable flat-surfaced spindle-top for respective rotary spindles;

b) wherein that the at least three spindle-tops'"'"' axes of rotation are perpendicular to the respective spindle-tops'"'"' flat surfaces;

c) providing an abrading machine base having a horizontal flat top surface and a spindle-circle where the spindle-circle is coincident with the machine base flat top surface;

d) wherein the at least three rotary spindles are located with equal spaces between each of them and the spindle-tops'"'"' axes of rotation intersect the machine base spindle-circle and the rotary spindles are attached to the machine base top surface at those spindle-circle locations;

e) wherein the at least three spindle-tops'"'"' flat surfaces are aligned to be co-planar with each other;

f) providing a floating, rotatable abrading platen having a precision-flat annular abrading-surface that has an annular abrading-surface radial width and an annular abrading-surface inner radius and an annular abrading-surface outer radius and where the floating, rotatable abrading platen is supported by and is rotationally driven about a floating, rotatable abrading platen rotation axis located at a rotational center of the floating, rotatable abrading platen by a spherical-action rotation device located at a rotational center of the floating, rotatable abrading platen and where the floating, rotatable abrading platen spherical-action rotation device restrains the floating, rotatable abrading platen in a radial direction relative to the floating, rotatable abrading platen axis of rotation and where the abrading platen axis of rotation is concentric with the machine base spindle-circle;

g) spherically moving the floating, rotatable abrading platen about the abrading platen rotational center where the precision-flat annular abrading-surface of the floating, rotatable abrading platen that is supported by the floating, rotatable abrading platen spherical-action rotation device is nominally horizontal; and

h) providing flexible abrasive disk articles having annular bands of abrasive coated surfaces that have an abrasive coated surface annular band radial width and an abrasive coated surface annular band inner radius and an abrasive coated surface annular band outer radius and attaching a selected flexible abrasive disk in flat conformal contact with a floating, rotatable abrading platen precision-flat annular abrading-surface such that the attached abrasive disk is concentric with the abrading platen precision-flat annular abrading-surface wherein the abrading platen precision-flat annular abrading-surface radial width is at least equal to the radial width of the attached flexible abrasive disk'"'"'s abrasive coated annular abrading band and wherein the floating, rotatable abrading platen precision-flat annular abrading-surface provides conformal support of the full-abrasive-surface of the flexible abrasive disk'"'"'s abrasive coated surface annular band where the floating, rotatable abrading platen precision-flat annular abrading-surface inner radius is less than the inner radius of the attached flexible abrasive disk'"'"'s abrasive coated surface annular band and where the abrading platen precision-flat annular abrading-surface outer radius is greater than the outer radius of the attached flexible abrasive disk'"'"'s abrasive coated surface annular band;

i) attaching each flexible abrasive disk in flat conformal contact with the floating, rotatable abrading platen precision-flat annular abrading-surface by a disk attachment technique selected from the group consisting of vacuum disk attachment techniques, mechanical disk attachment techniques and adhesive disk attachment techniques;

j) providing approximately equal thickness workpieces having parallel or near-parallel opposed flat workpiece top surfaces and flat workpiece bottom surfaces attached in flat-surfaced contact with the flat surfaces of respective at least three spindle-tops where the workpiece bottom surfaces contact the flat surfaces of the respective at least three spindle-tops;

k) moving the floating, rotatable abrading platen vertically along the abrading platen rotation axis by the floating, rotatable abrading platen spherical-action rotation device to allow the abrasive surface of the flexible abrasive disk that is attached to the floating, rotatable abrading platen precision-flat annular abrading-surface to contact the top surfaces of the workpieces that are attached to the flat surfaces of the respective at least three spindle-tops wherein the at least three rotary spindles provide at least three-point support of the floating, rotatable abrading platen; and

l) applying a total floating, rotatable abrading platen abrading contact force workpieces that are attached to the respective at least three spindle-top flat surfaces by contact of the abrasive surface of the flexible abrasive disk that is attached to the floating, rotatable abrading platen precision-flat annular abrading-surface with the top surfaces of the workpieces that are attached to the flat surfaces of the respective at least three spindle-tops, wherein the total floating abrading platen contact force is controlled through the floating, rotatable abrading platen spherical-action abrading platen rotation device to allow the total floating, rotatable abrading platen abrading contact force to be evenly distributed to the workpieces attached to the respective at least three spindle-tops;

m) the at least three spindle-tops having the attached approximately equal thickness workpieces are rotated about the respective spindle-tops'"'"' rotation axes and the abrading platen having the attached flexible abrasive disk are rotated about the abrading platen rotation axis to single-side abrade the approximately equal thickness workpieces that are attached to the flat surfaces of the at least three spindle-tops while the moving abrasive surface of the flexible abrasive disk that is attached to the moving floating, rotatable abrading platen precision-flat annular abrading-surface is in force-controlled abrading contact with the top surfaces of the approximately equal thickness workpieces that are attached to the respective at least three spindle-tops and where the floating, rotatable abrading platen precision-flat annular abrading-surface assumes a co-planar alignment with the precisely co-planar flat surfaces of the respective at least three spindle-tops;

n) installing selected abrasive disks comprising flexible abrasive disks, flexible raised-island abrasive disks, flexible abrasive disks having attached solid abrasive pellets, chemical mechanical planarization resilient disk pads, shallow-island abrasive disks, flat-surfaced slurry abrasive plate disks, non-abrasive cloth or material pads with an automated robotic device where the selected abrasive disks are attached to the floating, rotatable platen flat-surfaced abrading by picking selected individual abrasive disks from a corresponding abrasive disk storage device and transporting it to the platen abrading surface where the selected individual abrasive disk is positioned concentrically with the rotational center of the platen and the flexible abrasive disk is pressed conformably against the abrading surface of the floating, rotatable abrading platen wherein the abrasive disk is attached to the floating, rotatable abrading platen abrading surface with vacuum for abrading action on the workpieces by the abrading machine apparatus;

o) wherein the automated robotic device sequentially removes selected abrasive disk from the flat abrading surface of the platen by picking the abrasive disk from the platen after the abrasive disk attachment vacuum is released and transporting the removed abrasive disk to an abrasive disk storage device for storage.

17. The process of claim 16 wherein the robotic abrasive disk loading apparatus selectively installs and removes abrasive disks to and from the platen of the at least three-point fixed-spindle floating-platen abrading machine apparatus wherein the at least three spindle-tops'"'"' flat surfaces are aligned to be co-planar with each other.

18. The process of claim 16 wherein the robotic abrasive disk loading apparatus selectively installs and removes abrasive disks to and from a platen of an at least three-point fixed-spindle floating-platen abrading machine apparatus having a machine base that has a machine base having a nominally-flat surface where the at least three rotary spindles are mechanically attached to the machine base nominally-flat top surface at respective at least three rotary spindles'"'"' spindle-circle locations by respective at least three rotary spindle-support adjustable-height mounting legs that are approximately equally spaced around the outer periphery of the rotary spindles to form at least three-point support of the at least three rotary spindles and wherein the at least three spindle-tops'"'"' flat surfaces are aligned to be co-planar with each other.

19. The process of claim 16 wherein the robotic abrasive disk loading apparatus selectively installs and removes abrasive disks to and from a platen of an at least three-point fixed-spindle floating-platen abrading machine apparatus comprising:

a) a machine base having a nominally-flat surface;

b) rotary spindle two-piece spindle-mount devices consisting of a rotatable spindle-mount spherical-action rotor and a stationary spindle-mount spherical-base where both have a common-radius spherical-joint wherein the rotatable spindle-mount spherical-action rotors are mounted in common-radius spherical-joint surface contact with respective stationary spindle-mount spherical-bases and wherein the rotatable spindle-mount spherical-action rotors are supported by the respective stationary spindle-mount spherical-bases where each rotary spindle two-piece spindle-mount device allows the rotatable spindle-mount spherical-action rotors to be rotated through spherical angles relative to the respective stationary spindle-mount spherical-bases and wherein the at least three rotary spindles are mechanically attached to respective at least three rotary spindle two-piece spindle-mount devices'"'"' rotatable spindle-mount spherical-action rotors and wherein rotary spindle two-piece spindle-mount devices'"'"' locking devices have the capability to lock the respective rotatable spindle-mount spherical-action rotors to the respective stationary spindle-mount spherical-bases;

c) wherein the at least three rotary spindles are located with approximately equal spacing between the at least three of the rotary spindles and that the at least three spindle-tops'"'"' axes of rotation intersect the machine base spindle-circle and the respective at least three rotary spindle two-piece spindle-mount devices'"'"' spindle-mount spherical-bases are mechanically attached to the machine base nominally-flat top surface at those respective at least three rotary spindles'"'"' spindle-circle locations;

d) wherein the at least three spindle-tops'"'"' flat surfaces are aligned to be co-planar with each other by spherical rotation of the rotatable spindle-mount spherical-action rotors relative to the respective stationary spindle-mount spherical-bases;

e) wherein rotary spindle two-piece spindle-mount devices'"'"' locking devices lock the respective rotatable spindle-mount spherical-action rotors to the respective stationary spindle-mount spherical-bases to structurally maintain the co-planar alignment of the at least three spindle-tops'"'"' flat surfaces.

20. The process of claim 16 wherein the at least three rotary spindles are air bearing rotary spindles.