SENSOR AND METHOD FOR MANUFACTURING A SENSOR
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Abstract
A sensor having a substrate, a cap and a seismic mass is proposed, the substrate having a main extension plane, the seismic mass being deflectable perpendicular to the main extension plane, a first stop of the cap covering a first area of the seismic mass perpendicular to the main extension plane in a first coverage region and a second stop of the cap covering a second area of the seismic mass perpendicular to the main extension plane in a second coverage region, and furthermore the first and second coverage regions parallel to the main extension plane being essentially equal in size. The distances of the coverage regions from a pivot axis of the mass designed as a rocker are equal so that the torques caused by electronic forces offset one another.
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Citations
24 Claims
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1-8. -8. (canceled)
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9. A sensor comprising:
- a substrate, a cap and a seismic mass, the substrate having a main extension plane, the seismic mass being deflectable perpendicular to the main extension plane, a first stop of the cap covering a first area of the seismic mass perpendicular to the main extension plane in a first coverage region and a second stop of the cap covering a second area of the seismic mass perpendicular to the main extension plane in a second coverage region, wherein the first and second coverage regions parallel to the main extension plane are of essentially equal size.
- View Dependent Claims (10, 11, 12, 13, 14, 15, 16, 17, 18, 19, 20, 21, 22, 23, 24)
Specification