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IN-PLANE SENSOR AND METHOD FOR MAKING SAME

  • US 20110226060A1
  • Filed: 06/01/2011
  • Published: 09/22/2011
  • Est. Priority Date: 05/09/2008
  • Status: Active Grant
First Claim
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1. An in-plane sensor, comprising:

  • a fixed structure including a fixed finger and a fixed column connected to each other, the fixed finger having a supported end supported by the fixed column and a suspended end; and

    a movable structure including at least one mass body and an extending finger connected to each other;

    wherein the supported end of the fixed finger is closer to the mass body than the suspended end is.

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