IN-PLANE SENSOR AND METHOD FOR MAKING SAME
First Claim
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1. An in-plane sensor, comprising:
- a fixed structure including a fixed finger and a fixed column connected to each other, the fixed finger having a supported end supported by the fixed column and a suspended end; and
a movable structure including at least one mass body and an extending finger connected to each other;
wherein the supported end of the fixed finger is closer to the mass body than the suspended end is.
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Abstract
According to the present invention, an in-plane sensor comprises: a fixed structure including a fixed finger and a fixed column connected to each other, the fixed finger having a supported end supported by the fixed column and a suspended end which is unsupported; and a movable structure including at least one mass body and an extending finger connected to each other; wherein the supported end of the fixed finger is closer to the mass body than the suspended end is.
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Citations
10 Claims
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1. An in-plane sensor, comprising:
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a fixed structure including a fixed finger and a fixed column connected to each other, the fixed finger having a supported end supported by the fixed column and a suspended end; and a movable structure including at least one mass body and an extending finger connected to each other; wherein the supported end of the fixed finger is closer to the mass body than the suspended end is. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9)
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10-26. -26. (canceled)
Specification