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FLUID STORAGE AND DISPENSING SYSTEM INCLUDING DYNAMIC FLUID MONITORING OF FLUID STORAGE AND DISPENSING VESSEL

  • US 20110232367A1
  • Filed: 06/07/2011
  • Published: 09/29/2011
  • Est. Priority Date: 10/25/2004
  • Status: Active Grant
First Claim
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1. A monitoring system for monitoring fluid in a fluid supply vessel in a gas box of an ion implanter during operation including dispensing of fluid from the fluid supply vessel, said monitoring system including (i) a monitoring assembly in the gas box, adapted to monitor at least one characteristic of the fluid supply vessel or the fluid dispensed therefrom, and transmit an output correlative to the at least one monitored characteristic, and (ii) an output assembly external to the ion implanter, with said monitoring assembly being arranged in signal transmission relationship to the output assembly by a signal transmission arrangement including a signal transmission optical cable extending exteriorly of the ion implanter to the output assembly.

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