PHYSICAL AMOUNT DETECTING DEVICE, PHYSICAL AMOUNT DETECTING APPARATUS, AND ELECTRONIC APPARATUS
First Claim
1. A physical amount detecting device comprising:
- a base portion;
one pair of connection arms that extend from the base portion in opposite directions along an X axis;
one pair of driving vibration arms that extend from the base portion in opposite directions along a Y axis;
one pair of first detection vibration arms that extend from one of the one pair of connection arms in opposite directions along the Y axis; and
one pair of second detection vibration arms that extend from the other of the one pair of connection arms in opposite directions along the Y axis,wherein one and the other of the one pair of the driving vibration arms are bending-vibrated with opposite phases in a direction of the X-axis,wherein the one pair of the first detection vibration arms and the one pair of the second detection vibration arms are vibrated with opposite phases in a direction of the Y axis in accordance with the bending vibration of the one pair of driving vibration arms,wherein, depending on a Coriolis force that is generated in accordance with rotational angular velocity of X-axis rotation, one and the other of the one pair of the first detection vibration arms are bending-vibrated with a first phase in a direction of a Z axis in addition to vibration in the direction of the Y axis, and one and the other of the one pair of the second detection vibration arms are bending-vibrated with a second phase, which is a phase opposite to the first phase, in the direction of the Z axis in addition to vibration in the direction of the Y axis.
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Accused Products
Abstract
A physical amount detecting device includes: one pair of driving vibration arms are bending-vibrated in a direction of a X-axis, one pair of first detection vibration arms and one pair of second detection vibration arms are vibrated in a direction of a Y axis, depending on a Coriolis force that is generated in accordance with rotational angular velocity of X-axis rotation, the one pair of the first detection vibration arms are bending-vibrated with a first phase in a direction of a Z axis in addition to vibration in the direction of the Y axis, and the one pair of the second detection vibration arms are bending-vibrated with a second phase, which is a phase opposite to the first phase, in the direction of the Z axis in addition to vibration in the direction of the Y axis.
39 Citations
7 Claims
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1. A physical amount detecting device comprising:
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a base portion; one pair of connection arms that extend from the base portion in opposite directions along an X axis; one pair of driving vibration arms that extend from the base portion in opposite directions along a Y axis; one pair of first detection vibration arms that extend from one of the one pair of connection arms in opposite directions along the Y axis; and one pair of second detection vibration arms that extend from the other of the one pair of connection arms in opposite directions along the Y axis, wherein one and the other of the one pair of the driving vibration arms are bending-vibrated with opposite phases in a direction of the X-axis, wherein the one pair of the first detection vibration arms and the one pair of the second detection vibration arms are vibrated with opposite phases in a direction of the Y axis in accordance with the bending vibration of the one pair of driving vibration arms, wherein, depending on a Coriolis force that is generated in accordance with rotational angular velocity of X-axis rotation, one and the other of the one pair of the first detection vibration arms are bending-vibrated with a first phase in a direction of a Z axis in addition to vibration in the direction of the Y axis, and one and the other of the one pair of the second detection vibration arms are bending-vibrated with a second phase, which is a phase opposite to the first phase, in the direction of the Z axis in addition to vibration in the direction of the Y axis. - View Dependent Claims (2, 3, 4, 5, 6, 7)
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Specification