LAMINATED STRUCTURE PROVIDED WITH MOVABLE PORTION

• US 20110232384A1
• Filed: 03/14/2011
• Published: 09/29/2011
• Est. Priority Date: 03/25/2010
• Status: Active Grant

• Current Assignee: Kabushiki Kaisha Toyota Chuo Kenkyusho (Toyota Motor Corporation)
• Original Assignee: Kabushiki Kaisha Toyota Chuo Kenkyusho (Toyota Motor Corporation)
• Inventors: FUJIYOSHI, Motohiro, NONOMURA, Yutaka, OMURA, Yoshiteru, AKASHI, Teruhisa, HATA, Yoshiyuki, FUNABASHI, Hirofumi
• Granted Patent: US 8,707,784 B2
• Time in Patent Office: Days
• US Class Current: 73/504.12
• CPC Class Codes: G01C 19/574 the devices having two sensing masses in anti-phase motion
• CPC Class Codes: G01P 15/125 by capacitive pick-up
• CPC Class Codes: G01P 15/18 in two or more dimensions
• CPC Class Codes: G01P 2015/082 for two degrees of freedom of movement of a single mass

Abstract

A structure having a first movable portion that is displaced perpendicular to a substrate surface and a second movable portion that is displaced parallel to the substrate surface is realized by a laminated structure, and manufacturing cost is reduced by employing a nested structure for the first movable portion and the second movable portion. The laminated structure is provided with a frame-like outer movable portion and an inner movable portion housed within the frame of the outer movable portion. A y spring is connected to the outer movable portion, and the outer movable portion is displaceably supported in a y-axis direction by the y spring at a height apart from an outer substrate. A z spring is connected to the inner movable portion, and the inner movable portion is displaceably supported in a z-axis direction by the z spring at a height apart from the outer substrate. The outer movable portion and the z spring are at different heights from the substrate, and the z spring overpasses across the outer movable portion at a height apart from the outer movable portion.

Claims

1. A laminated structure, when three mutually orthogonal axes are defined as an x-axis, a y-axis and a z-axis, and a substrate surface is defined as an x-y plane, comprising:

an outer movable portion provided with two sides extending in an x-axis direction and two sides extending in a y-axis direction; and

an inner movable portion housed inside the outer movable portion when viewed from a z-axis direction;

wherein

a y spring is connected to the outer movable portion, and the outer movable portion is displaceably supported in the y-axis direction by the y spring at a height apart from the substrate,

a z spring is connected to the inner movable portion, and the inner movable portion is displaceably supported in the z-axis direction by the z spring at a height apart from the substrate,

the outer movable portion and the z spring are formed in different layers at different heights from the substrate, and

the z spring overpasses across the outer movable portion at a height apart from the outer movable portion.

2. The laminated structure according to claim 1, wherein

an x relaying portion is added that is located outside the outer movable portion when viewed from the z-axis direction,

the y spring and the z spring are connected to the x relaying portion,

an x spring connects the x relaying portion to the substrate,

the x relaying portion is displaceably supported in the x-axis direction by the x spring at a height apart from the substrate,

the outer movable portion is displaceably supported in the x-axis direction and the y-axis direction by the x spring and the y spring at a height apart from the substrate, and

the inner movable portion is displaceably supported in the x-axis direction and the z-axis direction by the x spring and the z spring at a height apart from the substrate.

3. The laminated structure according to claim 2, wherein

an oscillating portion that reciprocatory oscillates the x relaying portion in the x-axis direction, a y relaying portion, a y displacement detection unit that detects y-axis directional displacement of the y relaying portion, a z relaying portion, and a z displacement detection unit that detects z-axis directional displacement of the z relaying portion are added, and wherein

the z relaying portion, together with being connected to the inner movable portion through a second x spring, is connected to the substrate through a second z spring, and is displaceably supported in the z-axis direction at a height apart from the substrate,

the y relaying portion, together with being connected to the outer movable portion through a third x spring, is connected to the substrate through a second y spring, and is displaceably supported in the y-axis direction at a height apart from the substrate, and

angular velocities about the y-axis and about the z-axis are detectable.

4. The laminated structure according to claim 2, wherein an x displacement detection unit that detects x-axis directional displacement of the x relaying portion, a y relating portion, a y displacement detection unit that detects y-axis directional displacement of the y relaying portion, a z relaying portion, and a z displacement detection unit that detects z-axis directional displacement of the z relaying portion are added, wherein

the z relaying portion, together with being connected to the inner movable portion through a second x spring, is connected to the substrate through a second z spring, and is displaceably supported in the z-axis direction at a height apart from the substrate,

the y relating portion, together with being connected to the outer movable portion through a third x spring, is connected to the substrate through a second y spring, and is displaceably supported in the y-axis direction at a height apart from the substrate, and

accelerations in the x-axis direction, the y-axis direction and the z-axis direction are detectable.

5. A laminated structure, when three mutually orthogonal axes are defined as an x-axis, a y-axis and a z-axis, and a substrate surface is defined as an x-y plane, comprising:

an outer movable portion provided with two sides extending in an x-axis direction and two sides extending in a y-axis direction; and

an inner movable portion housed inside the outer movable portion when viewed from a z-axis direction, wherein

a y spring is interposed between the outer movable portion and a substrate, and the outer movable portion is displaceably supported in the y-axis direction by the y spring at a height apart from the substrate, and

a y-z spring connects the inner movable portion to the outer movable portion, a z spring is interposed between the inner movable portion and the substrate, and the inner movable portion is displaceably supported in the z-axis direction by the y-z spring and the z spring at a height apart from the substrate.

6. The laminated structure according to claim 5, wherein an x relaying portion located outside the outer movable portion when viewed from the z-axis direction is added,

the y spring is connected to the x relaying portion,

an x spring connects the x relaying portion and the substrate,

the x relaying portion is displaceably supported in the x-axis direction by the x spring at a height apart from the substrate,

the outer movable portion is displaceably supported in the x-axis direction and the y-axis direction by the x spring and the y spring at a height apart from the substrate,

a second x spring is added between the inner movable portion and the substrate, and

the inner movable portion is displaceably supported in the x-axis direction and the z-axis direction by the second x spring and the z spring at a height apart from the substrate.

7. The laminated structure according to claim 6, wherein an oscillating portion that reciprocatory oscillates the x relaying portion in the x-axis direction, a y relaying portion, a y displacement detection unit that detects y-axis directional displacement of the y relaying portion, a z relaying portion, and a z displacement detection unit that detects z-axis directional displacement of the z relaying portion are added, wherein

the z relaying portion, together with being inserted between the z spring and the second x spring, is displaceably supported in the z-axis direction at a height apart from the substrate,

the y relaying portion, together with being connected to the outer movable portion through a third x spring, is connected to the substrate through a second y spring, and is displaceably supported in the y-axis direction at a height apart from the substrate, and

angular velocities about the y-axis and about the z-axis are detectable.

8. The laminated structure according to claim 6, wherein an x displacement detection unit that detects x-axis directional displacement of the x relaying portion, a y relating portion, a y displacement detection unit that detects y-axis directional displacement of the y relaying portion, a z relaying portion, and a z displacement detection unit that detects z-axis directional displacement of the z relaying portion are added, wherein

the z relaying portion, together with being inserted between the z spring and the second x spring, is displaceably supported in the z-axis direction at a height apart from the substrate,

the y relating portion, together with being connected to the outer movable portion through a third x spring, is connected to the substrate through a second y spring, and is displaceably supported in the y-axis direction at a height apart from the substrate, and

accelerations in the x-axis direction, the y-axis direction and the z-axis direction are detectable.