SUBSTRATE CLEANING CHAMBER AND COMPONENTS
First Claim
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1. A consumable ceramic liner to connect a gas outlet channel of a remote chamber to a gas inlet channel of a substrate cleaning chamber, the ceramic liner comprising:
- (a) an inlet cylinder having an outer diameter sized to fit in the gas outlet channel of the remote chamber;
(b) an outlet cylinder connected to the gas inlet channel of the substrate cleaning chamber; and
(c) a conical flare joining the inlet cylinder to the outlet cylinder.
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Abstract
A consumable ceramic liner can be used for connecting a gas outlet channel of a remote chamber to a gas inlet channel of a substrate cleaning chamber. The ceramic liner comprises an inlet cylinder having an outer diameter sized to fit in the gas outlet channel of the remote chamber, and an outlet cylinder connected to the gas inlet channel of the substrate cleaning chamber. A conical flare joins the inlet cylinder to the outlet cylinder.
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Citations
20 Claims
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1. A consumable ceramic liner to connect a gas outlet channel of a remote chamber to a gas inlet channel of a substrate cleaning chamber, the ceramic liner comprising:
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(a) an inlet cylinder having an outer diameter sized to fit in the gas outlet channel of the remote chamber; (b) an outlet cylinder connected to the gas inlet channel of the substrate cleaning chamber; and (c) a conical flare joining the inlet cylinder to the outlet cylinder. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12)
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- 13. A consumable ceramic liner for connecting a gas outlet channel of a remote chamber to a gas inlet channel of a substrate cleaning chamber, the ceramic liner composed of quartz in a thickness that is sufficiently thick to scavenge ion species from the energized gas generated in the remote gas energizer for at least about 30,000 process cycles.
Specification