METHOD AND APPARATUS TO SCRIBE A LINE IN A THIN FILM MATERIAL USING A BURST OF LASER PULSES WITH BENEFICIAL PULSE SHAPE
First Claim
1. A laser-based processing method of scribing a pattern in a thin film of material deposited on a substrate, comprising:
- choosing a beneficial laser pulse temporal power shape suitable to scribe a pattern in said thin film material on a substrate such that no observable cracks are formed in the substrate at the pattern scribed in said thin film thereby; and
providing a series of laser pulses characterized by a first pulse and at least 9 following pulses, where each laser pulse in the series is characterized by said beneficial laser pulse temporal power shape, and each pulse in the series is further characterized by a laser spot with a laser spot area; and
placing the laser spot of the first pulse at a spot position on said thin film material; and
placing the laser spots of each of the following pulses in the series of pulses at spot positions along a pattern on said thin film such that each spot position is adjacent to the spot position of the laser spot of the previous pulse, and there is an overlap of spot positions such that an area of each spot overlaps in some amount an area of each previous spot.
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Abstract
A series of laser pulses in a pulse train, each pulse with a beneficial temporal power shape instead of the conventional laser temporal power shape, scribes a line in a thin film of material on a substrate. The beneficial temporal pulse shape has a spike/plateau chair shape or a square pulse shape. Scribing a line in the thin film is achieved by placing the series of laser pulse spots on the line to be scribed such that there is an overlapping area between adjacent laser pulse spots along the line. The use of a series of laser pulses with beneficial pulse shape to scribe a line in the thin film results in a better quality and cleaner scribing process compared to that achieved with the conventional pulse shape.
44 Citations
27 Claims
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1. A laser-based processing method of scribing a pattern in a thin film of material deposited on a substrate, comprising:
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choosing a beneficial laser pulse temporal power shape suitable to scribe a pattern in said thin film material on a substrate such that no observable cracks are formed in the substrate at the pattern scribed in said thin film thereby; and providing a series of laser pulses characterized by a first pulse and at least 9 following pulses, where each laser pulse in the series is characterized by said beneficial laser pulse temporal power shape, and each pulse in the series is further characterized by a laser spot with a laser spot area; and placing the laser spot of the first pulse at a spot position on said thin film material; and placing the laser spots of each of the following pulses in the series of pulses at spot positions along a pattern on said thin film such that each spot position is adjacent to the spot position of the laser spot of the previous pulse, and there is an overlap of spot positions such that an area of each spot overlaps in some amount an area of each previous spot. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12, 13, 14)
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15. A laser-based processing method of scribing a pattern in a thin film of material deposited on a substrate, comprising:
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choosing a beneficial laser pulse temporal power shape suitable to scribe a pattern in said thin film material on a substrate such that no observable cracks are formed in the substrate or in the edge of the thin film material at the pattern scribed in said thin film thereby; and providing a series of laser pulses characterized by a first pulse and at least 9 following pulses, where each laser pulse in the series is characterized by said beneficial laser pulse temporal power shape, and each pulse in the series is further characterized by a laser spot with a laser spot area; and placing the laser spot of the first pulse at a spot position on said thin film material; and placing the laser spots of each of the following pulses in the series of pulses at spot positions along a pattern on said thin film such that each spot position is adjacent to the spot position of the laser spot of the previous pulse, and there is an overlap of spot positions such that an area of each spot overlaps in some amount an area of each previous spot. - View Dependent Claims (16, 17, 18, 19, 20, 21, 22, 23, 24, 25, 26, 27)
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Specification