SEMICONDUCTOR COMPONENT AND METHODS FOR PRODUCING A SEMICONDUCTOR COMPONENT
First Claim
1. A semiconductor component, with a semiconductor body, comprising:
- a substrate of a first conduction type;
a buried semiconductor layer of a second conduction type arranged on the substrate; and
a functional unit semiconductor layer of a third conduction type arranged on the buried semiconductor layer, in which at least two semiconductor functional units are arranged laterally alongside one another are provided;
wherein the buried semiconductor layer is a part of at least one semiconductor functional unit, and the semiconductor functional units are electrically insulated from one another by an isolation structure which permeates the functional unit semiconductor layer, the buried semiconductor layer and the substrate;
wherein the isolation structure comprises at least one trench and an electrically conductive contact to the substrate, the electrically conductive contact to the substrate being electrically insulated from the functional unit semiconductor layer and the buried layer by the at least one trench; and
wherein the isolation structure comprises two trenches and a semiconducting zone of the first conduction type situated between the trenches.
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Accused Products
Abstract
A semiconductor component includes a semiconductor body, in which are formed: a substrate of a first conduction type, a buried semiconductor layer of a second conduction type arranged on the substrate, and a functional unit semiconductor layer of a third conduction type arranged on the buried semiconductor layer, in which at least two semiconductor functional units arranged laterally alongside one another are provided. The buried semiconductor layer is part of at least one semiconductor functional unit, the semiconductor functional units being electrically insulated from one another by an isolation structure which permeates the functional unit semiconductor layer, the buried semiconductor layer, and the substrate. The isolation structure includes at least one trench and an electrically conductive contact to the substrate, the contact to the substrate being electrically insulated from the functional unit semiconductor layer and the buried layer by the at least one trench.
57 Citations
13 Claims
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1. A semiconductor component, with a semiconductor body, comprising:
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a substrate of a first conduction type; a buried semiconductor layer of a second conduction type arranged on the substrate; and a functional unit semiconductor layer of a third conduction type arranged on the buried semiconductor layer, in which at least two semiconductor functional units are arranged laterally alongside one another are provided; wherein the buried semiconductor layer is a part of at least one semiconductor functional unit, and the semiconductor functional units are electrically insulated from one another by an isolation structure which permeates the functional unit semiconductor layer, the buried semiconductor layer and the substrate; wherein the isolation structure comprises at least one trench and an electrically conductive contact to the substrate, the electrically conductive contact to the substrate being electrically insulated from the functional unit semiconductor layer and the buried layer by the at least one trench; and wherein the isolation structure comprises two trenches and a semiconducting zone of the first conduction type situated between the trenches. - View Dependent Claims (2, 3, 4, 5, 6)
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7. A semiconductor component, with a semiconductor body, comprising:
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a substrate of a first conduction type; a buried semiconductor layer of a second conduction type arranged on the substrate; and a functional unit semiconductor layer of a third conduction type arranged on the buried semiconductor layer, in which at least two semiconductor functional units are arranged laterally alongside one another are provided; wherein the buried semiconductor layer is a part of at least one semiconductor functional unit, and the semiconductor functional units are electrically insulated from one another by an isolation structure which permeates the functional unit semiconductor layer, the buried semiconductor layer and the substrate; wherein the isolation structure comprises at least one trench and an electrically conductive contact to the substrate, the electrically conductive contact to the substrate being electrically insulated from the functional unit semiconductor layer and the buried layer by the at least one trench; and wherein the isolation structure comprises two trenches and a semiconducting zone of the first conduction type situated between the trenches, the semiconducting zone comprising a buried layer of the first conduction type and a doped region of the first conduction type. - View Dependent Claims (8, 9, 10)
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11. A semiconductor component, with a semiconductor body, comprising:
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a substrate of a first conduction type; a buried semiconductor layer of a second conduction type arranged on the substrate; and a functional unit semiconductor layer of a third conduction type arranged on the buried semiconductor layer, in which at least two semiconductor functional units are arranged laterally alongside one another are provided; wherein the buried semiconductor layer is a part of at least one semiconductor functional unit, and the semiconductor functional units are electrically insulated from one another by an isolation structure which permeates the functional unit semiconductor layer, the buried semiconductor layer and the substrate; wherein the isolation structure comprises at least one trench and an electrically conductive contact to the substrate, the electrically conductive contact to the substrate being electrically insulated from the functional unit semiconductor layer and the buried layer by the at least one trench; and wherein the isolation structure comprises two trenches and a semiconducting zone of the first conduction type situated between the trenches, the semiconducting zone including one semiconductor region that reaches a surface of the functional unit semiconductor layer, and forms a low-impedance contact to the substrate. - View Dependent Claims (12, 13)
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Specification