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LCOS DISPLAY UNIT AND METHOD FOR FORMING THE SAME

  • US 20110237009A1
  • Filed: 06/08/2011
  • Published: 09/29/2011
  • Est. Priority Date: 12/04/2006
  • Status: Active Grant
First Claim
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1. A method for forming a Liquid Crystal on Silicon (LCOS) display unit, comprising:

  • providing a silicon substrate;

    forming a pixel switch circuit layer on the silicon substrate, the pixel switch circuit layer including a Metal-Oxide-Semiconductor Field Effect Transistor (MOSFET);

    forming a light shielding layer on the pixel switch circuit layer;

    forming an insulation layer on the light shielding layer; and

    forming a micromirror layer on the insulation layer;

    the micromirror layer, the insulation layer and the light shielding layer constituting a capacitor, and the micromirror layer being electrically connected with a source of the MOSFET, wherein the light shielding layer is grounded.

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