LCOS DISPLAY UNIT AND METHOD FOR FORMING THE SAME
First Claim
1. A method for forming a Liquid Crystal on Silicon (LCOS) display unit, comprising:
- providing a silicon substrate;
forming a pixel switch circuit layer on the silicon substrate, the pixel switch circuit layer including a Metal-Oxide-Semiconductor Field Effect Transistor (MOSFET);
forming a light shielding layer on the pixel switch circuit layer;
forming an insulation layer on the light shielding layer; and
forming a micromirror layer on the insulation layer;
the micromirror layer, the insulation layer and the light shielding layer constituting a capacitor, and the micromirror layer being electrically connected with a source of the MOSFET, wherein the light shielding layer is grounded.
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Abstract
An embodiment of the present invention discloses a Liquid Crystal on Silicon (LCOS) display unit, in which a Metal-Insulator-Metal (MIM) capacitor consisting of a micromirror layer, a insulation layer and a light shielding layer is formed by grounding the light shielding layer on a pixel switch circuit layer. Therefore the pixel switch circuit and the capacitor are in vertical distribution, that is, the switch circuit and the capacitor both have an allowable design area of the size of one pixel. Another embodiment of the present invention provides a method for forming a Liquid Crystal on Silicon (LCOS) display unit.
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Citations
9 Claims
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1. A method for forming a Liquid Crystal on Silicon (LCOS) display unit, comprising:
- providing a silicon substrate;
forming a pixel switch circuit layer on the silicon substrate, the pixel switch circuit layer including a Metal-Oxide-Semiconductor Field Effect Transistor (MOSFET); forming a light shielding layer on the pixel switch circuit layer; forming an insulation layer on the light shielding layer; and forming a micromirror layer on the insulation layer; the micromirror layer, the insulation layer and the light shielding layer constituting a capacitor, and the micromirror layer being electrically connected with a source of the MOSFET, wherein the light shielding layer is grounded. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9)
- providing a silicon substrate;
Specification