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THIN-FILM TRANSISTOR, METHOD OF MANUFACTURING THE SAME, AND DISPLAY DEVICE

  • US 20110240998A1
  • Filed: 03/22/2011
  • Published: 10/06/2011
  • Est. Priority Date: 03/30/2010
  • Status: Active Grant
First Claim
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1. A thin film transistor comprising an oxide semiconductor layer including a source region, a drain region, and a channel region wherein a portion of the source and drain regions has an oxygen concentration less than the channel region.

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