NON-CONTACT DETECTION OF SURFACE FLUID DROPLETS
First Claim
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1. A system for detecting fluid on a substrate comprising:
- a sensor board;
a first capacitive sensor mounted on the sensor board, the first capacitive sensor having a transmit sensor pad for transmitting a signal, a receive sensor pad for receiving the signal, and an analog-to-digital convertor connected with the receive sensor pad for analyzing the received signal; and
a platform upon which the substrate is to be placed, wherein the platform is a first distance from the transmit and receive sensor pads.
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Abstract
A system for detecting fluid on a substrate is provided. The system includes, but is not limited to, a sensor board, a first capacitive sensor, and a platform upon which the substrate is to be placed. The first capacitive sensor is mounted on the sensor board. The first capacitive sensor has a transmit sensor pad for transmitting a signal, a receive sensor pad for receiving the signal, and an analog-to-digital convertor connected with the receive sensor pad for analyzing the received signal. The platform is a first distance from the transmit and receive sensor pads.
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Citations
20 Claims
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1. A system for detecting fluid on a substrate comprising:
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a sensor board; a first capacitive sensor mounted on the sensor board, the first capacitive sensor having a transmit sensor pad for transmitting a signal, a receive sensor pad for receiving the signal, and an analog-to-digital convertor connected with the receive sensor pad for analyzing the received signal; and a platform upon which the substrate is to be placed, wherein the platform is a first distance from the transmit and receive sensor pads. - View Dependent Claims (2, 3, 4, 5, 6, 7)
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8. A method for detection of fluid on a substrate comprising:
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placing a substrate on a platform under a fluid detector, wherein the fluid detector comprises a sensor board and a first capacitive sensor mounted on the sensor board; and measuring the capacitance of the capacitive sensor; and determining if fluid is on the substrate based on the measured capacitance of the capacitive sensor. - View Dependent Claims (9, 10, 11, 12)
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13. An apparatus for detecting fluid on a substrate comprising:
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a first capacitive sensor positioned a distance away from a platform upon which the substrate is to be placed, the first capacitive sensor having a transmit sensor pad for transmitting a capacitance signal, a receive sensor pad for receiving the capacitance signal, and an analog-to-digital convertor connected with the receive sensor pad for analyzing the received capacitance signal and determining any change in capacitance of the first capacitive sensor, wherein the capacitive sensor is capable of forming an electric field between the transmit sensor pad and the receive sensor pad when transmitting the capacitance signal, and wherein the electric field is capable of traveling to a surface of a substrate on the platform; and detection circuitry connected with the analog-to-digital convertor, comprising a microprocessor executing pattern recognition and decision making algorithms, wherein the detection circuitry is for analyzing any change in capacitance of the first capacitive sensor by determining any change in the electric field and then determining if any fluid is present on a surface of a substrate on the platform. - View Dependent Claims (14, 15, 16, 17, 18, 19, 20)
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Specification