OXYGEN PERMEABILITY MEASURING APPARATUS AND METHOD, AND DEFECT INSPECTION APPARATUS AND METHOD

• US 20110244577A1
• Filed: 03/31/2011
• Published: 10/06/2011
• Est. Priority Date: 03/31/2010
• Status: Active Grant

• Current Assignee: Fujifilm Corporation (Fujifilm Holdings Corporation)
• Original Assignee: Fujifilm Corporation (Fujifilm Holdings Corporation)
• Inventors: SHIMODA, Tomoyuki, INAGAKI, Yoshio, MIYAMOTO, Kimiaki
• Granted Patent: US 8,647,876 B2
• Time in Patent Office: Days
• US Class Current: 436/1
• CPC Class Codes: G01N 21/766 of gases
• CPC Class Codes: Y10T 436/20 Oxygen containing
• CPC Class Codes: Y10T 436/207497 Molecular oxygen
• CPC Class Codes: Y10T 436/209163 Dissolved or trace oxygen or oxygen content of a sealed environment

Abstract

An oxygen permeability measuring apparatus for measuring an oxygen permeation rate of oxygen barrier film in a dark room is provided. A container is charged with inert gas, and sealed hermetically by use of the oxygen barrier film at least partially. A chemiluminescent compound is contained in the container, for emitting light by oxidation with the oxygen. A photon detector detects photons emitted by the chemiluminescent compound so as to determine an amount of the oxygen permeated through the oxygen barrier film. Preferably, the container includes a container body. An opening is formed in the container body, and closed hermetically by the oxygen barrier film attached thereto. The photon detector is disposed inside or outside the container. The oxygen permeation rate is equal to or less than 10⁻² cc/m²·day·atm. The chemiluminescent compound includes tetrakis(dimethylamino)ethylene.

Claims

1. An oxygen permeability measuring apparatus for measuring an oxygen permeation rate of oxygen barrier film, comprising:

a container, disposed in a dark room, charged with inert gas, and sealed hermetically by use of said oxygen barrier film at least partially;

a chemiluminescent compound, contained in said container, for emitting light by oxidation with oxygen; and

a photon detector for detecting photons emitted by said chemiluminescent compound so as to determine an amount of said oxygen permeated through said oxygen barrier film into said container.

2. An oxygen permeability measuring apparatus as defined in claim 1, wherein said container includes:

a container body; and

an opening, formed in said container body, and closed hermetically by said oxygen barrier film.

3. An oxygen permeability measuring apparatus as defined in claim 1, wherein said container is a container bag constituted by said oxygen barrier film.

4. An oxygen permeability measuring apparatus as defined in claim 3, wherein said photon detector is disposed inside or outside said container.

5. An oxygen permeability measuring apparatus as defined in claim 1, wherein said oxygen permeation rate is equal to or less than 10⁻

2 cc/m²·

day·

atm.

6. An oxygen permeability measuring apparatus as defined in claim 1, wherein said chemiluminescent compound includes a compound according to a formula of:

7. An oxygen permeability measuring apparatus as defined in claim 6, wherein said chemiluminescent compound includes tetrakis(dimethylamino)ethylene.

8. An oxygen permeability measuring apparatus as defined in claim 1, wherein said photon detector includes a photomultiplier tube.

9. An oxygen permeability measuring method comprising steps of:

containing a chemiluminescent compound in a container charged with inert gas, said chemiluminescent compound emitting light by oxidation with oxygen;

permeating oxygen-containing gas through oxygen barrier film;

providing said oxygen-containing gas to contact said chemiluminescent compound in said container, to emit light;

detecting photons emitted by said chemiluminescent compound; and

determining an amount of said oxygen permeated through said oxygen barrier film according to an amount of said photons.

10. An oxygen permeability measuring method as defined in claim 9, wherein said container is hermetically sealed by said oxygen barrier film at least partially.

11. An oxygen permeability measuring method as defined in claim 10, wherein said container includes:

a container body; and

an opening, formed in said container body, and closed hermetically by said oxygen barrier film.

12. An oxygen permeability measuring method as defined in claim 10, wherein said container is a container bag constituted by said oxygen barrier film.

13. An oxygen permeability measuring method as defined in claim 9, further comprising steps of:

before said permeating step, hermetically sealing a gas container with said oxygen barrier film in charging said gas container with inert gas; and

after said permeating step, drawing said permeated oxygen-containing gas from said gas container to introduce said permeated oxygen-containing gas into said container.

14. A defect inspection apparatus for an oxygen barrier material, comprising:

a hermetic container, disposed in a dark room, constituted by said oxygen barrier material at least partially;

a chemiluminescent compound, contained in said container, for emitting light by oxidation with oxygen;

a photon counter for detecting a number M of photons emitted by said chemiluminescent compound;

a comparison unit for checking whether said number M is more than a threshold N; and

a determining device for determining a detection position of said photon counter upon detecting said number M if said comparison unit determines that M>

N.

15. A defect inspection apparatus as defined in claim 14, further comprising a moving device for moving said photon counter along said oxygen barrier material.

16. A defect inspection apparatus as defined in claim 14, wherein said photon counter is constituted by plural photon counters disposed in a photon counter array.

17. A defect inspection apparatus as defined in claim 16, wherein said photon counter array is disposed along a surface of said oxygen barrier material.

18. A defect inspection apparatus as defined in claim 14, further comprising a condensing lens for light condensing of said photons emitted by said chemiluminescent compound to said photon counter.

19. A defect inspection apparatus as defined in claim 14, wherein said oxygen barrier material has an inner surface fitted on said chemiluminescent compound, and seals said container.

20. A defect inspection apparatus as defined in claim 19, wherein said container includes:

a container body; and

an opening, formed in said container body, and closed hermetically by said oxygen barrier material.

21. A defect inspection apparatus as defined in claim 14, wherein said chemiluminescent compound includes tetrakis(dimethylamino)ethylene.

22. A defect inspection apparatus as defined in claim 14, wherein said photon counter includes a photomultiplier tube.

23. A defect inspection method for an oxygen barrier material, comprising steps of:

containing a chemiluminescent compound in a hermetic container for emitting light by oxidation with oxygen, said container being constituted by said oxygen barrier material at least partially;

exposing said container in presence of said oxygen in a dark room with said chemiluminescent compound contained therein;

said exposing step including;

detecting a number M of photons emitted by said chemiluminescent compound by use of a photon counter contained in said container;

checking whether said number M is more than a threshold N; and

determining a detection position of said photon counter upon detecting said number M if M>

N.

24. A defect inspection method as defined in claim 23, wherein in said exposing step, said photon counter is moved along said oxygen barrier material and detects said number Min plural positions thereof.