COATING HOLDER AND COATING DEVICE HAVING SAME

• US 20110247558A1
• Filed: 06/21/2010
• Published: 10/13/2011
• Est. Priority Date: 04/09/2010
• Status: Active Grant

• Current Assignee: Hon Hai Precision Industry Co., Ltd.
• Original Assignee: Hon Hai Precision Industry Co., Ltd.
• Inventors: PEI, SHAO-KAI
• Granted Patent: US 8,545,632 B2
• Time in Patent Office: Days
• US Class Current: 118/723.R
• CPC Class Codes: C23C 14/50 Substrate holders
• CPC Class Codes: C23C 14/505 for rotation of the substrates
• CPC Class Codes: C23C 16/458 characterised by the method used for supporting substrates in the reaction chamber
• CPC Class Codes: C23C 16/4584 the substrate being rotated
• CPC Class Codes: C23C 16/4588 the substrate being rotated

Abstract

A coating holder for holding a plurality of workpieces includes a rotating shaft, a first driving member, a plurality of hanging arms, a plurality of supporting trays, and a plurality of second driving members. The first driving member is configured for driving the rotating shaft to rotate. The hanging arms extend from the rotating shaft. Each hanging arm includes a free end distal from the rotating shaft. The supporting trays are configured for holding the workpieces. The second driving members are fixed in the respective free ends and are connected to the respective supporting trays. The second driving members are configured for driving the supporting trays to rotate.

Claims

1. A coating holder for holding a plurality of workpieces, comprising:

a rotating shaft;

a first driving member configured for driving the rotating shaft to rotate;

a plurality of hanging arms extending from the rotating shaft, each hanging arm comprising a free end distal from the rotating shaft;

a plurality of supporting trays configured for holding the workpieces; and

a plurality of second driving members fixed in the respective free ends and connected to the respective supporting trays, the second driving members configured for driving the supporting trays to rotate.

2. The coating holder as claimed in claim 1, wherein each hanging arm is substantially a straight beam perpendicularly extending from the rotating shaft.

3. The coating holder as claimed in claim 1, wherein each hanging arm comprises a connecting portion and a hanging portion substantially parallel with the rotating shaft, the connecting portion connecting the hanging portion to the rotating shaft.

4. The coating holder as claimed in claim 3, wherein the first driving member is a servomotor comprising a first stator and a first rotor fixedly connected to the rotating shaft.

5. The coating holder as claimed in claim 4, wherein each second driving member is a servomotor comprising a second stator and a second rotor connected to the corresponding supporting tray.

6. The coating holder as claimed in claim 5, wherein a first through hole is defined in the free end, each second stator is fixed in the corresponding first through hole, and each second rotor is fixedly connected to the corresponding supporting tray.

7. The coating holder as claimed in claim 6, wherein a second through hole is defined in each supporting tray, the second rotors engage in the respective second through holes.

8. The coating holder as claimed in claim 7, further comprising a plurality of magnets mounted on each supporting tray.

9. A coating holder for holding a plurality of workpieces, comprising:

a rotating shaft;

a first driving member coupled to the rotating shaft configured for driving the rotating shaft to rotate about a first axis;

a plurality of hanging arms fixedly coupled to the rotating shaft, each hanging arm comprising a free end distal from the rotating shaft;

a plurality of supporting trays pivotedly coupled to the respective free ends; and

a plurality of second driving members each configured for driving the supporting trays to rotate about a second axis substantially perpendicular to the first axis.

10. The coating holder as claimed in claim 9, wherein each supporting tray includes a first side and an opposite second side, and the supporting trays are rotatable about the second axis between a first position where the first sides of the supporting trays are substantially located on a common plane and face upward, and a second position where the second sides of the supporting trays are substantially located on the common plane and face upward.

11. The coating holder as claimed in claim 9, wherein each supporting tray includes a plurality of recesses defined in the first and second sides thereof for holding the workpieces.

12. A coating device for coating a plurality of workpieces, comprising:

a vacuum container;

a plasma source received in the vacuum container; and

a coating holder received in the vacuum container facing the plasma source, the coating holder configured for holding the workpieces, the coating holder comprising;

a rotating shaft;

a first driving member configured for driving the rotating shaft to rotate;

a plurality of hanging arms extending from the rotating shaft, each hanging arm comprising a free end distal from the rotating shaft;

a plurality of supporting trays configured for holding the workpieces; and

a plurality of second driving members fixed in the respective free ends and connected to the respective supporting trays, the second driving members configured for driving the supporting trays to rotate.

13. The coating device as claimed in claim 12 wherein each hanging arm is substantially a straight beam perpendicularly extending from the rotating shaft.

14. The coating device as claimed in claim 12, wherein each hanging arm comprises a connecting portion and a hanging portion substantially parallel with the rotating shaft, the connecting portion connecting the hanging portion to the rotating shaft.

15. The coating device as claimed in claim 14, wherein the first driving member is a servomotor comprising a first stator and a first rotor fixedly connected to the rotating shaft.

16. The coating device as claimed in claim 15, wherein each second driving member is a servomotor comprising a second stator and a second rotor connected to the corresponding supporting tray.

17. The coating device as claimed in claim 16, wherein a first through hole is defined in the free end, each second stator is fixed in the corresponding first through hole, and each second rotor is fixedly connected to the corresponding supporting tray.

18. The coating device as claimed in claim 17, wherein a second through hole is defined in each supporting tray, the second rotors engage in the respective second through holes.

19. The coating device as claimed in claim 18, further comprising a plurality of magnets mounted on each supporting tray.