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SENSOR SUBSTRATE SYSTEMS AND METHODS

  • US 20110248184A1
  • Filed: 04/30/2010
  • Published: 10/13/2011
  • Est. Priority Date: 04/07/2010
  • Status: Active Grant
First Claim
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1. A sensing apparatus comprising:

  • a substrate having a first side for a sensing element and a second side for electronics; and

    the substrate having at least one via from the first side of the substrate to the second side of the substrate;

    wherein the at least one via is hermetically sealed from the first side of the substrate to the second side of the substrate; and

    wherein the at least one via is at least partially filled with an optically transmissive material.

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