THIN FILM TRANSISTOR, DISPLAY DEVICE, AND ELECTRONIC UNIT

• US 20110248270A1
• Filed: 04/01/2011
• Published: 10/13/2011
• Est. Priority Date: 04/09/2010
• Status: Active Grant

• Current Assignee: JDI Design and Development GK
• Original Assignee: Sony Corporation (Sony Group Corp.)
• Inventors: Terai, Yasuhiro, Fukumoto, Eri, Morosawa, Narihiro
• Granted Patent: US 8,378,351 B2
• Time in Patent Office: Days
• US Class Current: 257/59
• CPC Class Codes: H01L 29/517 the insulating material comprising a metallic compound, e.g. metal oxide, metal silicate H01L29/518 takes precedence
• CPC Class Codes: H01L 29/7869 having a semiconductor body comprising an oxide semiconductor material, e.g. zinc oxide, copper aluminium oxide, cadmium stannate

Abstract

A thin film transistor using oxide semiconductor for a channel, which may be controlled such that threshold voltage is positive and may be improved in reliability is provided. The thin film transistor includes a gate electrode, a pair of source/drain electrodes, an oxide semiconductor layer forming a channel and provided between the gate electrode and the pair of source/drain electrodes, a first insulating film as a gate insulating film provided on the oxide semiconductor layer on a side near the gate electrode, and a second insulating film provided on the oxide semiconductor layer on a side near the pair of source/drain electrodes. One or both of the first insulating film and the second insulating film includes an aluminum oxide having a film density of 2.70 g/cm³ or more and less than 2.79 g/cm³.

Claims

1. A thin film transistor comprising:

a gate electrode;

a source electrode;

a drain electrode;

an oxide semiconductor layer forming a channel and provided between the gate electrode and the source and drain electrodes;

a first insulating film as a gate insulating film provided on the oxide semiconductor layer on a side near the gate electrode, and

a second insulating film provided on the oxide semiconductor layer on a side near the source and drain electrodes,

wherein one or both of the first insulating film and the second insulating film includes an aluminum oxide having a film density of 2.70 g/cm³ or more and less than 2.79 g/cm³.

2. The thin film transistor according to claim 1,

wherein the one or both of insulating films are a single-layer film.

3. The thin film transistor according to claim 1,

wherein the one or both of insulating films have a two-layer structure, and

one layer includes silicon oxide or silicon nitride, and the other layer includes the aluminum oxide.

4. The thin film transistor according to claim 3,

wherein the layer including aluminum oxide is stacked on the oxide semiconductor layer via the layer including silicon oxide or silicon nitride.

5. The thin film transistor according to claim 1,

wherein the one or both of insulating films have a three-layer structure, and

one layer of the insulating film includes the aluminum oxide, and other two layers include silicon oxide or silicon nitride, and sandwich the layer including the aluminum oxide.

6. The thin film transistor according to claim 1,

wherein film density of the insulating film has a gradient in a depth direction, and the gradient of the film density is low on a side near the oxide semiconductor layer.

7. A display device including display elements and thin film transistors for driving the display elements, each of the thin film transistors comprising:

a gate electrode;

a source electrode;

a drain electrode;

an oxide semiconductor layer forming a channel and provided between the gate electrode and the source and drain electrodes;

a first insulating film as a gate insulating film provided on the oxide semiconductor layer on a side near the gate electrode; and

a second insulating film provided on the oxide semiconductor layer on a side near the source and drain electrodes,

wherein one or both of the first insulating film and the second insulating film includes aluminum oxide having a film density of 2.70 g/cm³ or more and less than 2.79 g/cm³.

8. An electronic unit having a display device which includes display elements and thin film transistors for driving the display elements, each of the thin film transistors comprising:

a gate electrode;

a source electrode;

a drain electrode;

an oxide semiconductor layer forming a channel and provided between the gate electrode and the source and drain electrodes;

a first insulating film as a gate insulating film provided on the oxide semiconductor layer on a side near the gate electrode; and

a second insulating film provided on the oxide semiconductor layer on a side near the source and drain electrodes,

wherein one or both of the first insulating film and the second insulating film includes aluminum oxide having a film density of 2.70 g/cm³ or more and less than 2.79 g/cm³.