STACKED DUAL INDUCTOR STRUCTURE

• US 20110248811A1
• Filed: 04/07/2010
• Published: 10/13/2011
• Est. Priority Date: 04/07/2010
• Status: Active Grant

• Current Assignee: Xilinx, Inc. (Advanced Micro Devices, Inc.)
• Original Assignee: Xilinx, Inc. (Advanced Micro Devices, Inc.)
• Inventors: Kireev, Vassili
• Granted Patent: US 8,143,987 B2
• Time in Patent Office: Days
• US Class Current: 336/200
• CPC Class Codes: H01L 23/5227 Inductive arrangements or effects of, or between, wiring layers other inductive arrangements H01L23/645
• CPC Class Codes: H01L 2924/00 Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
• CPC Class Codes: H01L 2924/0002 Not covered by any one of groups H01L24/00, H01L24/00 and H01L2224/00
• CPC Class Codes: H01L 2924/3011 Impedance

Abstract

The dual inductor structure can include a first inductor including a first plurality of coils. Each coil of the first plurality of coils can be disposed within a different one of a plurality of conductive layers. The coils of the first plurality of coils can be vertically stacked and concentric to a vertical axis. The dual inductor structure further can include a second inductor including a second plurality of coils. Each of the second plurality of coils can be disposed within a different one of the plurality of conductive layers. The coils of the second plurality of coils can be vertically stacked and concentric to the vertical axis. Within each conductive layer, a coil of the second plurality of coils can be disposed within an inner perimeter of a coil of the first plurality of coils.

Claims

1. A dual inductor structure implemented within a semiconductor integrated circuit (IC), the dual inductor structure comprising:

a first inductor comprising a first plurality of coils;

wherein each coil of the first plurality of coils is disposed within a different one of a plurality of conductive layers, wherein the first plurality of coils is vertically stacked and concentric to a vertical axis;

a second inductor comprising a second plurality of coils, wherein each coil of the second plurality of coils is disposed within a different one of the plurality of conductive layers;

wherein the second plurality of coils are vertically stacked and concentric to the vertical axis; and

wherein, within each conductive layer, a coil of the second plurality of coils is disposed within an inner perimeter of a coil of the first plurality of coils.

2. The dual inductor structure of claim 1, wherein each coil of the first plurality of coils comprises a single turn and a same line-width as each other coil of the first plurality of coils.

3. The dual inductor structure of claim 1, wherein each coil of the second plurality of coils comprises at least one turn, a same line-width, and a same number of turns as each other coil of the second plurality of coils.

4. The dual inductor structure of claim 1, further comprising:

a first terminal of the first inductor coupled to an input pad of the IC;

a first terminal of the second inductor coupled to an internal node of the IC;

wherein the first terminal of the first inductor and the first terminal of the second inductor are disposed in the conductive layer of the plurality of conductive layers farthest from a substrate of the IC;

a second terminal coupled to the first inductor and the second inductor;

wherein the second terminal is disposed in the conductive layer of the plurality of conductive layers that is closest to the substrate;

wherein the second terminal is configured to couple to a different internal node of the IC; and

wherein the second terminal electrically couples the first inductor and the second inductor in series.

5. The dual inductor structure of claim 1, further comprising:

a first terminal of the first inductor coupled to an input pad of the IC;

a first terminal of the second inductor coupled to an internal node of the IC;

wherein the first terminal of the first inductor and the first terminal of the second inductor are disposed in the conductive layer of the plurality of conductive layers closest to a substrate of the IC;

a second terminal coupled to the first inductor and the second inductor;

wherein the second terminal is disposed on the conductive layer of the plurality of conductive layers that is farthest from the substrate;

wherein the second terminal is configured to couple to a different internal node of the IC; and

wherein the second terminal electrically couples the first inductor and the second inductor in series.

6. The dual inductor structure of claim 1, wherein a coil of the first plurality of coils and a coil of the second plurality of coils, within a same conductive layer, are configured to flow current in a same direction.

7. The dual inductor structure of claim 1, wherein the line-width of the first plurality of coils is greater than the line-width of the second plurality of coils.

8. The dual inductor structure of claim 7, wherein each coil of the second plurality of coils comprises a greater number of turns than each coil of the first plurality of coils to generate approximately a same inductive value for the first inductor and the second inductor.

9. The dual inductor structure of claim 1, wherein the first plurality of coils of the first inductor are coupled in series with at least one via and the second plurality of coils of the second inductor are coupled in series with at least one via.

10. The dual inductor structure of claim 1, wherein the inductive value of the first inductor is approximately equal to the inductive value of the second inductor.

11. A dual inductor structure implemented within a semiconductor integrated circuit (IC), the dual inductor structure comprising:

a first conductive layer comprising a first coil of a first inductor and a first coil of a second inductor;

wherein the first coil of the second inductor is disposed within the first coil of the first inductor;

a second conductive layer comprising a second coil of the first inductor and a second coil of the second inductor;

wherein the second coil of the first inductor has a same line-width as, and is vertically stacked directly beneath, the first coil of the first inductor; and

wherein the second coil of the second inductor has a same line-width as, and is vertically stacked directly beneath, the first coil of the second inductor.

12. The dual inductor structure of claim 11, further comprising:

a third conductive layer comprising a third coil of the first inductor and a third coil of the second inductor;

wherein the third coil of the first inductor has the same line-width as, and is vertically stacked directly beneath, the second coil of the first inductor; and

wherein the third coil of the second inductor has the same line-width as, and is vertically stacked directly beneath, the second coil of the second inductor.

13. The dual inductor structure of claim 11:

wherein each coil of the first inductor is implemented as a coil comprising a single turn;

wherein each coil of the second inductor is implemented as a coil comprising at least one turn; and

wherein each coil of the second inductor has a same number of turns.

14. The dual inductor structure of claim 11, wherein a coil of the first inductor and a coil of the second inductor, within a same conductive layer, are configured to flow current in a same direction.

15. The dual inductor structure of claim 11, further comprising:

a first terminal of the first inductor coupled to an input pad of the IC;

a first terminal of the second inductor coupled to an internal node of the IC;

wherein the first terminal of the first inductor and the first terminal of the second inductor are disposed in the conductive layer of the plurality of conductive layers farthest from a substrate of the IC;

a second terminal coupled to the first inductor and the second inductor;

wherein the third terminal is disposed in the conductive layer of the plurality of conductive layers that is closest to the substrate; and

wherein the second terminal electrically couples the first inductor and the second inductor in series.

16. The dual inductor structure of claim 11, further comprising:

a first terminal of the first inductor coupled to an input pad within the IC;

a first terminal of the second inductor coupled to an internal node of the IC;

wherein the first terminal of the first inductor and the first terminal of the second inductor are disposed in the conductive layer of the plurality of conductive layers closest to a substrate of the IC;

a second terminal coupled to the first inductor and the second inductor;

wherein the second terminal is disposed on the conductive layer of the plurality of conductive layers that is farthest from the substrate; and

wherein the second terminal electrically couples the first inductor and the second inductor in series.

17. The dual inductor structure of claim 11, wherein the coils of the first inductor are coupled in series with at least one via and the coils of the second inductor are coupled in series with at least one via.

18. A T-coil network circuit implemented within a semiconductor integrated circuit (IC), the T-coil network comprising:

a first inductor comprising a first terminal coupled to an input pad of the IC and a second terminal coupled to an input device of the IC

wherein the first inductor comprises a plurality of vertically stacked coils disposed within a plurality of conductive layers;

a second inductor comprising a first terminal and a second terminal;

wherein the second terminal of the second inductor is coupled to the second terminal of the first inductor;

wherein the second inductor comprises a plurality of vertically stacked coils;

wherein each coil of the second inductor comprises at least one turn and has a same number of turns;

wherein each conductive layer of the plurality of conductive layers comprises a single coil of the second inductor disposed within a single coil of the first inductor;

a termination resistor comprising a first terminal and a second terminal; and

wherein the first terminal of the termination resistor is coupled to the first terminal of the second inductor and the second terminal of the termination resistor is coupled to a predetermined voltage potential within the IC.

19. The T-coil network circuit of claim 18, wherein the plurality of coils of the first inductor and the plurality of coils of the second inductor are concentric to a vertical axis.

20. The T-coil network circuit of claim 18:

wherein a line-width of the first inductor is greater than a line-width of the second inductor; and

wherein each coil of the second inductor comprises a greater number of turns than each coil of the first inductor to generate approximately a same inductive value for the first inductor and the second inductor.