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Method and Apparatus for MEMS Phase Locked Loop

  • US 20110254599A1
  • Filed: 04/14/2011
  • Published: 10/20/2011
  • Est. Priority Date: 04/14/2010
  • Status: Active Grant
First Claim
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1. A method of driving an oscillating member, the method comprising:

  • applying a drive signal to the oscillating member, the drive signal having a drive frequency;

    providing a first reference signal indicative of the phase shift imparted on the drive signal by the oscillating member;

    decreasing the drive frequency if the phase shift is less than ninety degrees, and increasing the drive frequency if the phase shift is between ninety and one hundred eighty degrees.

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