MANUFACTURING STRUCTURE AND PROCESS FOR COMPLIANT MECHANISMS
First Claim
Patent Images
1. A MEMS device comprising:
- a first narrow beam wherein the first narrow beam completely enclose the boundary of a space.
2 Assignments
0 Petitions
Accused Products
Abstract
The invention relates, in various aspects, to systems and methods for MEMS actuated displays that can be driven at high speeds and at low voltages for improved image quality and reduced power consumption.
-
Citations
17 Claims
-
1. A MEMS device comprising:
a first narrow beam wherein the first narrow beam completely enclose the boundary of a space. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8)
-
9. A method of manufacturing a MEMS device, comprising:
forming a first narrow beam coupled to a substrate such that the first narrow beam completely encloses the boundary of a space. - View Dependent Claims (10, 11, 12, 13, 14, 15, 16, 17)
Specification