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SURFACE MEASUREMENT INSTRUMENT AND METHOD

  • US 20110258867A1
  • Filed: 10/15/2009
  • Published: 10/27/2011
  • Est. Priority Date: 10/17/2008
  • Status: Active Grant
First Claim
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1. A method of determining a correction parameter for use in effecting alignment of a component of a metrological apparatus in at least one direction, the method comprising:

  • positioning an artefact on a support surface of the metrological apparatus;

    using a measurement probe of a measurement instrument to make a first measurement of the measurement surface;

    effecting relative rotation of the measurement surface about a rotation axis such that a measurement surface of the artefact is asymmetric with respect to the rotation axis in the at lest one direction;

    using the measurement probe of the measurement instrument to make a second measurement of the measurement surface after the rotation; and

    determining a correction parameter from the first and second measurements.

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