SYSTEMS AND METHODS FOR PROVIDING HIGH-CAPACITANCE RF MEMS SWITCHES
First Claim
1. A micro-electro-mechanical switch assembly comprising:
- a substrate;
an electrode disposed on a portion of the substrate;
a dielectric layer disposed on at least a portion of the electrode;
a metal layer disposed on at least a portion of the dielectric layer; and
a flexible membrane having first and second ends supported at spaced locations on the substrate base,wherein the flexible membrane is configured to move from a default position to an actuated position in response to a preselected switching voltage applied between the flexible membrane and the electrode, andwherein, in the actuated position, the flexible membrane is in electrical contact with the metal layer.
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Accused Products
Abstract
Systems and methods for providing high-capacitive RF MEMS switches are provided. In one embodiment, the invention relates to a micro-electro-mechanical switch assembly including a substrate, an electrode disposed on a portion of the substrate, a dielectric layer disposed on at least a portion of the electrode, a metal layer disposed on at least a portion of the dielectric layer, and a flexible membrane having first and second ends supported at spaced locations on the substrate base, where the flexible membrane is configured to move from a default position to an actuated position in response to a preselected switching voltage applied between the flexible membrane and the electrode, and where, in the actuated position, the flexible membrane is in electrical contact with the metal layer.
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Citations
27 Claims
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1. A micro-electro-mechanical switch assembly comprising:
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a substrate; an electrode disposed on a portion of the substrate; a dielectric layer disposed on at least a portion of the electrode; a metal layer disposed on at least a portion of the dielectric layer; and a flexible membrane having first and second ends supported at spaced locations on the substrate base, wherein the flexible membrane is configured to move from a default position to an actuated position in response to a preselected switching voltage applied between the flexible membrane and the electrode, and wherein, in the actuated position, the flexible membrane is in electrical contact with the metal layer. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12, 13, 14, 15, 16)
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17. A method for manufacturing a micro-electro-mechanical switch assembly comprising:
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depositing an electrode material on a surface of a substrate; depositing a dielectric material on at least a portion of a surface of the electrode material; depositing a metal layer on at least a portion of a surface of the dielectric layer; depositing a plurality of posts on the substrate at positions spaced apart from the electrode material; depositing a spacer material on the metal layer and between the posts; depositing a flexible membrane on the spacer material and the posts; and etching the spacer material from the assembly. - View Dependent Claims (18, 19, 20, 21, 22, 23, 24, 25, 26, 27)
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Specification