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SYSTEMS AND METHODS FOR PROVIDING HIGH-CAPACITANCE RF MEMS SWITCHES

  • US 20110259717A1
  • Filed: 04/22/2010
  • Published: 10/27/2011
  • Est. Priority Date: 04/22/2010
  • Status: Active Grant
First Claim
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1. A micro-electro-mechanical switch assembly comprising:

  • a substrate;

    an electrode disposed on a portion of the substrate;

    a dielectric layer disposed on at least a portion of the electrode;

    a metal layer disposed on at least a portion of the dielectric layer; and

    a flexible membrane having first and second ends supported at spaced locations on the substrate base,wherein the flexible membrane is configured to move from a default position to an actuated position in response to a preselected switching voltage applied between the flexible membrane and the electrode, andwherein, in the actuated position, the flexible membrane is in electrical contact with the metal layer.

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