DEVICE AND METHOD FOR MICROSTRUCTURED PLASMA TREATMENT
First Claim
1. Device for the microstructured plasma treatment of a foil substrate comprising:
- a rotatably mounted cylindrical electrode having a surface of which comprises metal, wherein the metal is chromium, the surface having microstructured recesses;
a planar high-voltage electrode having a surface of which has a shape complementary to the surface of the rotatably mounted cylindrical electrode and disposed on a portion of the surface of the rotatably mounted cylindrical electrode extensively in a form fit;
a transport device for transporting the foil substrate to be treated between the surface of the rotatably mounted cylindrical electrode and the planar high-voltage electrodes; and
a device for supplying process gas to the surface of the rotatably mounted cylindrical electrode and into an intermediate space between the rotatably mounted cylindrical electrode and the planar high-voltage electrode.
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Accused Products
Abstract
The invention relates to a device for the microstructured plasma treatment of a film substrate, especially of a plastic film Said device comprises a rotatably received cylindrical electrode the surface of which contains or consists of metal, especially chromium, the surface having microstructured depressions, a planar high-voltage electrode the surface of which has a shape complementary to that of the cylindrical electrode and can be arranged on a section of the surface of the cylindrical electrode in a substantially form-fit manner, a transport device for transporting the film substrate to be treated between the surface of the cylindrical electrode and the high-voltage electrode, and a device for feeding a process gas to the surface of the cylindrical electrode and to the interspace between the cylindrical electrode and the high-voltage electrode.
2 Citations
13 Claims
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1. Device for the microstructured plasma treatment of a foil substrate comprising:
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a rotatably mounted cylindrical electrode having a surface of which comprises metal, wherein the metal is chromium, the surface having microstructured recesses; a planar high-voltage electrode having a surface of which has a shape complementary to the surface of the rotatably mounted cylindrical electrode and disposed on a portion of the surface of the rotatably mounted cylindrical electrode extensively in a form fit; a transport device for transporting the foil substrate to be treated between the surface of the rotatably mounted cylindrical electrode and the planar high-voltage electrodes; and a device for supplying process gas to the surface of the rotatably mounted cylindrical electrode and into an intermediate space between the rotatably mounted cylindrical electrode and the planar high-voltage electrode. - View Dependent Claims (2, 3, 4)
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5. Method for the microstructured plasma treatment of a foil substrate comprising:
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guiding the foil substrate between a surface of a rotatably mounted cylindrical electrode, the surface comprising chromium metal, and a surface of a planar high-voltage electrode, wherein the surface of the rotatably mounted cylindrical electrode has microstructured recesses and the surface of the planar high-voltage electrode has a shape complementary to the surface of the rotatably mounted cylindrical electrode and is disposed on a portion of the surface of the rotatably mounted cylindrical electrode extensively in a form fit; introducing a process gas between the surface of the rotatably mounted cylindrical electrode and a surface of the foil substrate; applying the foil substrate onto the surface of the rotatably mounted cylindrical electrode immediately after introducing the process gas such that the process gas enclosed in the microstructured recesses by the foil substrate; and applying a high voltage between the rotatably mounted cylindrical electrode and the planar high-voltage electrode such that a cold transient plasma gas discharge is produced in the enclosed process gas. - View Dependent Claims (6, 7, 8, 9, 10, 11, 12, 13)
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Specification