METHODS AND APPARATUS FOR CALIBRATING FLOW CONTROLLERS IN SUBSTRATE PROCESSING SYSTEMS

• US 20110265549A1
• Filed: 10/29/2010
• Published: 11/03/2011
• Est. Priority Date: 04/30/2010
• Status: Active Grant

• Current Assignee: Applied Materials Incorporated
• Original Assignee: Applied Materials Incorporated
• Inventors: XU, MING, LANE, JOHN W., GREGOR, MARIUSCH, COBB, CORIE LYNN, DARAN, BERRIN, BUCKIUS, DUC, NGUYEN, ANDREW, CRUSE, JAMES P.
• Granted Patent: US 8,707,754 B2
• Time in Patent Office: Days
• US Class Current: 73/1.16
• CPC Class Codes: F16K 37/00 Special means in or on valves or other cut-off apparatus for indicating or recording operation thereof, or for enabling an alarm to be given
• CPC Class Codes: F16K 37/0091 by measuring fluid parameters
• CPC Class Codes: G01F 25/00 Testing or calibration of apparatus for measuring volume, volume flow or liquid level or for metering by volume
• CPC Class Codes: H01L 21/67253 Process monitoring, e.g. flow or thickness monitoring
• CPC Class Codes: Y10T 137/8158 With indicator, register, recorder, alarm or inspection means
• CPC Class Codes: Y10T 137/87153 Plural noncommunicating flow paths
• CPC Class Codes: Y10T 137/87684 Valve in each inlet
• CPC Class Codes: Y10T 137/877 With flow control means for branched passages
• CPC Class Codes: Y10T 29/53022 with means to test work or product

Abstract

Methods and apparatus for calibrating a plurality of gas flows in a substrate processing system are provided herein. In some embodiments, a substrate processing system may include a cluster tool comprising a first process chamber and a second process chamber coupled to a central vacuum transfer chamber; a first flow controller to provide a process gas to the first process chamber; a second flow controller to provide the process gas to the second process chamber; a mass flow verifier to verify a flow rate from each of the first and second flow controllers; a first conduit to selectively couple the first flow controller to the mass flow verifier; and a second conduit to selectively couple the second flow controller to the mass flow verifier.

Claims

1. A method for calibrating a plurality of flow controllers in a substrate processing system comprising a first process chamber and a second process chamber coupled to a central vacuum transfer chamber, the method comprising:

providing a first gas at a first flow rate from a first flow controller coupled to a first process chamber;

diverting the first gas to a mass flow verifier via a first conduit;

determining the first flow rate using the mass flow verifier;

providing a second gas at a second flow rate from a second flow controller coupled to a second process chamber;

diverting the second gas to the mass flow verifier via a second conduit; and

determining the second flow rate using the mass flow verifier.

2. The method of claim 1, further comprising:

calibrating the first flow controller based on the determined first flow rate by the mass flow verifier; and

calibrating the second flow controller based on the determined second flow rate by the mass flow verifier.

3. The method of claim 1, wherein a first conduit coupling the first flow controller to the mass flow verifier and a second conduit coupling the second flow controller to the mass flow verifier have substantially the same flow conductance.

4. The method of claim 1, wherein a first conduit coupling the first flow controller to the mass flow verifier and a second conduit coupling the second flow controller to the mass flow verifier have different flow conductance, and wherein the mass flow verifier is further configured such that a flow rate of the first gas entering the mass flow verifier from the first conduit is independent of the flow conductance in the first conduit and a flow rate of the second gas entering the mass flow verifier through the second conduit is independent of the flow conductance in the second conduit.

5. The method of claim 1, further comprising:

flowing the first gas to the first flow controller from a first gas panel; and

flowing the second gas to the second flow controller from a second gas panel.

6. The method of claim 1, wherein the first gas and the second gas are the same gas and wherein the first gas and the second gas are provided to the first and second flow controllers from a common gas panel shared between the first and second process chambers.

7. The method of claim 1, further comprising:

idling the first flow controller after the determination of the first flow rate of the first flow controller is complete and prior to providing the second gas using the second flow controller to the mass flow verifier.

8. The method of claim 1, further comprising:

reinitiating the flow of the first gas by the first mass flow controller to the first process chamber after the determination of the first flow rate of the first flow controller is complete; and

maintaining the flow of the first gas by the first flow controller to the first process chamber while determining the second flow rate of the second flow controller.

9. The method of claim 1, further comprising:

providing the first gas at a third flow rate from a third flow controller coupled to the first process chamber;

diverting the first gas to the mass flow verifier via a third conduit; and

determining the third flow rate using the mass flow verifier, wherein the first flow controller provides the first gas to a first gas inlet of the first process chamber and the third flow controller provides the first gas to a second gas inlet of the first process chamber.

10. The method of claim 9, further comprising:

comparing the determined first and third flow rates to determine a flow rate ratio; and

calibrating the first and third flow controllers based on the determined flow rate ratio.

11. The method of claim 9, wherein the mass flow verifier is further configured such that a flow rate of the first gas entering the mass flow verifier from a first conduit is independent of the flow conductance in the first conduit and a flow rate of the first gas entering the mass flow verifier through a third conduit is independent of the flow conductance in the third conduit.

12. The method of claim 1, wherein a first conduit coupling the first flow controller to the mass flow verifier and a second conduit coupling the second flow controller to the mass flow verifier have different volumes, wherein the mass flow verifier is further configured such that a flow rate of the first gas entering the mass flow verifier from the first conduit is independent of the volume in the first conduit and a flow rate of the second gas entering the mass flow verifier through the second conduit is independent of the volume in the second conduit.

13. A method for calibrating a plurality of flow controllers in a substrate processing system, the method comprising:

providing a first gas to a mass flow verifier by a first flow controller coupled to a first zone of a first process chamber;

determining a first flow rate of the first gas using the mass flow verifier;

providing a second gas to the mass flow verifier by a second flow controller coupled to a second zone of the first process chamber; and

determining a second flow rate of the second gas using the mass flow verifier, wherein the first flow controller is capable of providing the first gas to the first zone while the second flow controller is providing the second gas to the mass flow verifier.

14. The method of claim 13, wherein the first gas and the second gas are provided at respective flow rates intended to obtain a desired flow ratio, and further comprising:

determining an actual flow ratio between the first and second flow rates; and

comparing the actual flow ratio to the desired flow ratio to determine whether the desired flow ratio is provided.

15. A substrate processing system, comprising:

a cluster tool comprising a first process chamber and a second process chamber coupled to a central vacuum transfer chamber;

a first flow controller to provide a process gas to the first process chamber;

a second flow controller to provide the process gas to the second process chamber;

a mass flow verifier to verify a flow rate from each of the first and second flow controllers;

a first conduit to selectively couple the first flow controller to the mass flow verifier; and

a second conduit to selectively couple the second flow controller to the mass flow verifier.

16. The substrate processing system of claim 15, wherein the first and second conduits have the same flow conductance.

17. The substrate processing system of claim 15, wherein the mass flow verifier further comprises:

a critical flow nozzle, wherein a flow rate of the first gas flowing through the critical flow nozzle is independent of the flow conductance in the first conduit and wherein a flow rate of the second gas flowing through the critical flow nozzle is independent of the flow conductance in the second conduit.

18. The substrate processing system of claim 15, further comprising:

a shared gas panel for providing the process gas to the first and second flow controllers.

19. The substrate processing system of claim 15, further comprising:

a third flow controller to provide the process gas to the first process chamber; and

a third conduit to selectively couple the third flow controller to the mass flow verifier to verify a flow rate from the third flow controller;

wherein the any two of the first, second, or third flow controllers is capable of flowing the process gas to a respective one of the first or second process chambers while any one of the first, second, or third flow controllers is being verified by the mass flow verifier.

20. A substrate processing system, comprising:

a first flow controller to provide a process gas to a first zone of a first process chamber;

a second flow controller to provide the process gas to a second zone of the first process chamber;

a mass flow verifier to verify a flow rate from each of the first and second flow controllers;

a first conduit to selectively couple the first flow controller to the mass flow verifier; and

a second conduit to selectively couple the second flow controller to the mass flow verifier.