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METHODS AND APPARATUS FOR CALIBRATING FLOW CONTROLLERS IN SUBSTRATE PROCESSING SYSTEMS

  • US 20110265549A1
  • Filed: 10/29/2010
  • Published: 11/03/2011
  • Est. Priority Date: 04/30/2010
  • Status: Active Grant
First Claim
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1. A method for calibrating a plurality of flow controllers in a substrate processing system comprising a first process chamber and a second process chamber coupled to a central vacuum transfer chamber, the method comprising:

  • providing a first gas at a first flow rate from a first flow controller coupled to a first process chamber;

    diverting the first gas to a mass flow verifier via a first conduit;

    determining the first flow rate using the mass flow verifier;

    providing a second gas at a second flow rate from a second flow controller coupled to a second process chamber;

    diverting the second gas to the mass flow verifier via a second conduit; and

    determining the second flow rate using the mass flow verifier.

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