APPARATUS FOR RADIAL DELIVERY OF GAS TO A CHAMBER AND METHODS OF USE THEREOF

• US 20110265887A1
• Filed: 10/19/2010
• Published: 11/03/2011
• Est. Priority Date: 04/30/2010
• Status: Active Grant

• Current Assignee: Applied Materials Incorporated
• Original Assignee: Applied Materials Incorporated
• Inventors: GOLD, EZRA ROBERT, LEE, JARED AHMAD, PAL, ANIRUDDHA, NGUYEN, ANDREW, AGARWAL, ANKUR, SALINAS, MARTIN JEFF, CRUSE, JAMES P.
• Granted Patent: US 8,562,742 B2
• Time in Patent Office: Days
• US Class Current: 137/334
• CPC Class Codes: H01L 21/67017 Apparatus for fluid treatment H01L21/67126, H01L21/6715 take precedence
• CPC Class Codes: H01L 21/67115 mainly by radiation
• CPC Class Codes: H01L 21/6719 characterized by the construction of the processing chambers, e.g. modular processing chambers
• CPC Class Codes: H01L 21/67201 characterized by the construction of the load-lock chamber
• CPC Class Codes: H01L 21/68785 characterised by the mechanical construction of the susceptor, stage or support
• CPC Class Codes: Y10T 137/6416 With heating or cooling of the system
• CPC Class Codes: Y10T 137/8593 Systems

Claims