HIGH-TEMPERATURE SELECTIVE DRY ETCH HAVING REDUCED POST-ETCH SOLID RESIDUE

• US 20110266252A1
• Filed: 07/20/2010
• Published: 11/03/2011
• Est. Priority Date: 04/30/2010
• Status: Active Grant

• Current Assignee: Applied Materials Incorporated
• Original Assignee: Applied Materials Incorporated
• Inventors: Thadani, Kiran V., Ingle, Nitin, Tang, Jing, Yang, Dongqing
• Granted Patent: US 8,475,674 B2
• Time in Patent Office: Days
• US Class Current: 216/17
• CPC Class Codes: H01J 37/32357 Generation remote from the workpiece, e.g. down-stream
• CPC Class Codes: H01L 21/31116 by dry-etching

Abstract

Methods of dry etching silicon-containing dielectric films are described. The methods include maintaining a relatively high temperature of the dielectric films while etching in order to achieve reduced solid residue on the etched surface. Partially or completely avoiding the accumulation of solid residue increases the etch rate.

Claims

1. A method of etching a silicon-containing layer on a substrate in a substrate processing region of a substrate processing chamber, the method comprising:

flowing a fluorine-containing precursor and a hydrogen-containing precursor into a remote plasma region fluidly coupled to the substrate processing region while forming a plasma in the plasma region to produce plasma effluents; and

etching the silicon-containing layer by flowing the plasma effluents into the substrate processing region while maintaining the substrate at a processing temperature between about 60°

C. and about 160°

C.

2. The method of claim 1 wherein the processing temperature of the substrate is between about 60°

C. and about 100°

C., and some solid residue remains on a surface of the substrate following the etching operation and the method further comprises sublimating the solid residue by raising the substrate above the sublimation temperature.

3. The method of claim 1 wherein the processing temperature of the substrate is between about 100°

C. and about 160°

C., and essentially no solid residue remains on the surface of the substrate following the etching operation.

4. The method of claim 1 further comprising pausing the flow of the plasma effluents into the substrate processing region to allow accumulated solid residue to sublimate and then restarting the flow of the plasma effluents to continue the etching operation with a renewed etch rate.

5. The method of claim 1 wherein the fluorine-containing precursor comprises at least one precursor selected from the group consisting of nitrogen trifluoride, hydrogen fluoride, diatomic fluorine, monatomic fluorine and fluorine-substituted hydrocarbons.

6. The method of claim 1 wherein the hydrogen-containing precursor comprises at least one precursor selected from the group consisting of atomic hydrogen, molecular hydrogen, ammonia, hydrazine, a hydrocarbon and an incompletely halogen-substituted hydrocarbon.

7. The method of claim 1 further comprising flowing steam (H2O) into the remote plasma region during the operation of flowing the fluorine-containing precursor into the remote plasma region.

8. The method of claim 1 wherein the silicon-containing layer comprises one of silicon oxide, silicon oxynitride or silicon nitride.

9. The method of claim 1 wherein the etching operation removes more than 300 Å

of material from the silicon-containing layer.

10. The method of claim 1 wherein the substrate is a patterned substrate having a narrow trench having a narrow width and a wide trench having a wide width and a etch rate of the silicon-containing film within the narrow trench is within 10% of the etch rate within the wide trench.

11. The method of claim 10 wherein the narrow width is less than 35 nm and the wide width is greater than 75 nm.

12. The method of claim 10 wherein the wide trench is in one of an open area or a peripheral area of an integrated circuit during fabrication.

13. The method of claim 1 wherein a temperature of the silicon-containing layer is less than 150°

C. during the etching operation.

14. The method of claim 1 wherein the silicon-containing layer is heated by a substrate support pedestal during the etching operation.

15. The method of claim 1 wherein the silicon-containing layer is heated using electromagnetic radiation during the etching operation.