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OPTICAL IMAGE MEASURING DEVICE AND CONTROL METHOD THEREOF

  • US 20110267583A1
  • Filed: 12/07/2009
  • Published: 11/03/2011
  • Est. Priority Date: 01/06/2009
  • Status: Active Grant
First Claim
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1. An optical image measuring device that forms tomographic images of at least a first depth zone and a second depth zone of a measured object, respectively, comprising:

  • a splitting part configured to split a low-coherence light into a signal light and a reference light;

    a switching part configured to switch an optical path length of said reference light to optical path lengths that correspond to at least said first depth zone and said second depth zone;

    an optical system comprising an objective lens and a focusing lens, and configured to condense said signal light into said first depth zone;

    a depth zone switching lens configured to be placed in a way that allows it to be inserted into and removed from said optical system, and condense said signal light into said second depth zone when it inserted into said optical system with said measured object and said objective lens positioned at a predetermined working distance;

    a control part configured to insert said depth zone switching lens into said optical system when the optical path length is switched to the optical path length that corresponds to said second depth zone by said switching part;

    an interference light generation part configured to generate an interference light by causing interference with said signal light via said optical system after being reflected from said measured object and said reference light via a light path of the optical path length that has been switched by said switching part;

    a detecting part configured to detect each of said interference lights in accordance with the control by said control part; and

    an image forming part configured to form tomographic images of said first depth zone and said second depth zone, respectively, based on the detection by said detecting part.

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