DISPLAY APPARATUS AND METHODS FOR MANUFACTURE THEREOF
First Claim
Patent Images
1. A MEMS-based assembly for a spatial light modulator comprising:
- a substrate;
a light-modulating portion supported over the substrate, wherein the light-modulating portion comprises;
a first portion, which, in all light-modulating portion positions, is oriented substantially horizontally with respect to the substrate; and
at least one second portion, which in all light-modulating portion positions, is at least partially transverse to first portion; and
an actuator for moving the light-modulating portion to selectively modulate light.
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Accused Products
Abstract
Display devices incorporating shutter-based light modulators are disclosed along with methods of manufacturing such devices. The methods are compatible with thin-film manufacturing processes known in the art and result in displays having lower power-consumption.
29 Citations
33 Claims
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1. A MEMS-based assembly for a spatial light modulator comprising:
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a substrate; a light-modulating portion supported over the substrate, wherein the light-modulating portion comprises; a first portion, which, in all light-modulating portion positions, is oriented substantially horizontally with respect to the substrate; and at least one second portion, which in all light-modulating portion positions, is at least partially transverse to first portion; and an actuator for moving the light-modulating portion to selectively modulate light. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12, 13, 14, 15, 16, 17, 18, 19, 20, 21, 22, 23, 24, 25, 26, 27, 28, 29, 30)
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31. A method of operating a MEMS-based assembly for a spatial light modulator, the MEMS-based assembly comprising a light-modulating portion supported over a substrate, wherein the light-modulating portion comprises a first portion and at least one second portion, the method comprising:
moving the light-modulating portion to a position for which light is not substantially transmitted, and for which the at least one second portion is at least partially transverse to the first portion.
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32. A display comprising:
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a substrate; a light-modulating portion supported over the substrate, wherein the light-modulating portion comprises a first portion, which, in all light-modulating portion positions, is oriented substantially horizontally with respect to the substrate, and at least one second portion, which in all light-modulating portion positions, is at least partially transverse to first portion; an actuator for moving the light-modulating portion to selectively modulate light; and at least one light source generating the light. - View Dependent Claims (33)
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Specification