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THIN FILM TRANSISTORS HAVING MULTIPLE DOPED SILICON LAYERS

  • US 20110269274A1
  • Filed: 10/28/2010
  • Published: 11/03/2011
  • Est. Priority Date: 11/03/2009
  • Status: Active Grant
First Claim
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1. A thin film transistor fabrication method, comprising:

  • depositing an amorphous silicon layer over a substrate having a gate electrode and a gate dielectric layer formed thereon;

    depositing two or more doped silicon layers over the amorphous silicon layer, each doped silicon layer having at least one characteristic that is different than the other doped silicon layers;

    depositing a metal layer over the two or more doped silicon layers;

    patterning the metal layer to form a source electrode and a drain electrode;

    patterning the two or more doped silicon layers to expose the amorphous silicon layer; and

    depositing a passivation layer over the source electrode, the drain electrode and the exposed amorphous silicon layer.

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