Profile measuring apparatus
First Claim
1. A profile measuring apparatus comprising:
- a profile measuring unit which has a projecting unit to project a predetermined pattern onto a measured object, and an imaging unit to image the pattern projected by the projecting unit;
a position acquiring unit which acquires a position of the profile measuring unit;
a profile calculating unit which is connected so as to be able to communicate with the imaging unit and the position acquiring unit and which calculates a profile of the measured object, based on image information from the imaging unit and position information from the position acquiring unit;
a deflection detecting unit which detects deflection of the projecting unit; and
a controlling unit which is connected to the deflection detecting unit and which executes at least either of active correction for position control or operation control of the profile measuring unit and passive correction for calculation operation of the profile calculating unit, based on the deflection of the projecting unit detected by the deflection detecting unit.
1 Assignment
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Accused Products
Abstract
According to one embodiment, a profile measuring apparatus comprises a profile measuring unit, a position acquiring unit, a profile calculating unit, a deflection detecting unit, and a controlling unit. The profile measuring unit has a projecting unit to project a pattern onto a measured object, and an imaging unit to image the pattern. The position acquiring unit acquires a position of the pattern on the measured object. The profile calculating unit calculates a profile of the measured object, based on image information from the imaging unit and position information from the position acquiring unit. The deflection detecting unit detects deflection of the projecting unit. The controlling unit executes active correction for the profile measuring unit and/or passive correction for the profile calculating unit, based on the deflection of the projecting unit detected by the deflection detecting unit.
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Citations
19 Claims
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1. A profile measuring apparatus comprising:
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a profile measuring unit which has a projecting unit to project a predetermined pattern onto a measured object, and an imaging unit to image the pattern projected by the projecting unit; a position acquiring unit which acquires a position of the profile measuring unit; a profile calculating unit which is connected so as to be able to communicate with the imaging unit and the position acquiring unit and which calculates a profile of the measured object, based on image information from the imaging unit and position information from the position acquiring unit; a deflection detecting unit which detects deflection of the projecting unit; and a controlling unit which is connected to the deflection detecting unit and which executes at least either of active correction for position control or operation control of the profile measuring unit and passive correction for calculation operation of the profile calculating unit, based on the deflection of the projecting unit detected by the deflection detecting unit. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12, 13, 14, 15, 16, 17, 18, 19)
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Specification