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Capacitive Pressure Sensor With Vertical Electrical Feedthroughs And Method To Make The Same

  • US 20110271764A1
  • Filed: 05/05/2010
  • Published: 11/10/2011
  • Est. Priority Date: 05/05/2010
  • Status: Active Grant
First Claim
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1. A sensing device, comprising:

  • a first sensing element disposed over a semiconductor die and configured to generate a first sensing signal upon detecting pressure;

    a second sensing element disposed over the semiconductor die adjacent to the first sensing element, and configured to generate a second sensing signal upon sensing ambient conditions; and

    a sensing circuit coupled to the second sensing element and capable of generating pressure sensing signal in response to the first sensing signal and the second sensing signal.

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