MAGNETICALLY DRIVEN MICROPUMP

• US 20110274566A1
• Filed: 09/30/2009
• Published: 11/10/2011
• Est. Priority Date: 02/12/2009
• Status: Active Grant

• Current Assignee: Board of Trustees of The University of Illinois
• Original Assignee: Board of Trustees of The University of Illinois
• Inventors: Zhou, Yu, Amirouche, Farid, Citerin, Johan, Cantwell, Matthew Lawrence
• Granted Patent: US 9,523,358 B2
• Time in Patent Office: Days
• US Class Current: 417/322
• CPC Class Codes: A61M 2205/0244 Micromachined materials, e.g. made from silicon wafers, microelectromechanical systems [MEMS] or comprising nanotechnology
• CPC Class Codes: A61M 5/1422 with double acting or multiple pistons
• CPC Class Codes: A61M 5/14224 Diaphragm type
• CPC Class Codes: F04B 43/028 with in- or outlet valve arranged in the plate-like flexible member valve arranged in the piston F04B53/12
• CPC Class Codes: F04B 43/043 Micropumps
• CPC Class Codes: F04B 45/047 Pumps having electric drive
• CPC Class Codes: F04B 49/08 Regulating by delivery pressure
• CPC Class Codes: F04B 53/10 Valves; Arrangement of valves
• CPC Class Codes: F16K 99/0001 Microvalves microdevices B81B1/00; manufacture or treatment of devices or systems in or on a substrate B81C1/00; microfluidic structures B01L3/5027; micropumps F04B19/006
• CPC Class Codes: F16K 99/0015 Diaphragm or membrane valves
• CPC Class Codes: F16K 99/0046 using magnets

Abstract

A magnetically driven micropump for handling small fluid volumes. The micropump includes a first chamber and a second chamber. A flexible membrane being disposed between the first and second chambers. The flexible membrane being magnetically coupled to an actuator for displacing the membrane.

Claims

1. A micropump for delivering a fluid, the micropump comprising:

a pump assembly including

a first pump body defining a first fluid body flow path, the first pump body including

a first chamber, the first chamber including a first chamber wall and a first side wall,

a first inlet and a first outlet, wherein the first inlet and first outlet are in fluid communication with the first chamber,

a second pump body defining a second fluid body flow path, the second pump body including

a second chamber, the second chamber including a second chamber wall and a second side wall,

a second inlet and a second outlet, wherein the second inlet and the second outlet are in fluid communication with the second chamber, and

a flexible membrane disposed between the first chamber and the second chamber; and

an actuator assembly configured to cooperate with the pump assembly, the actuator assembly including

a driver magnetically coupled to the membrane, and

a sensor configured to detect the position of the membrane,

wherein the driver applies a magnetic force to the membrane, causing the membrane to deflect, and wherein such deflection of the membrane results in a change of pressure within the first chamber and the second chamber thereby resulting in fluid flow; and

at least one valve in fluid communication with each of the first chamber and the second chamber, wherein the at least one valve is configured to direct the fluid flow in a predetermined direction.

2. The micropump of claim 1 wherein the at least one valve includes at least one of a first inlet check valve proximate to the first inlet, and a first outlet check valve proximate to the first outlet.

3. The micropump of claim 2 wherein the at least one first inlet check valve and first outlet check valve includes a valve membrane, the valve membrane including a plurality of intersecting slits radiating outwardly from a common point.

4. The micropump of claim 2 wherein the at least one of the first inlet check valve and the first outlet check valve is located within the first side wall in the first fluid body flow path.

5. The micropump of claim 4 wherein the at least one of the first inlet check valve and the first outlet check valve is integrally formed within the first sidewall.

6. The micropump of claim 2 further including at least one of a second inlet check valve proximate to the second inlet and a second outlet check valve proximate to the second outlet.

7. The micropump of claim 6 wherein the at least one of the second inlet check valve and the second outlet check valve is located within the second side wall in the fluid body flow path.

8. The micropump of claim 7 wherein the at least one of the second inlet check valve and the second outlet check valve is integrally formed within the second sidewall.

9. The micropump of claim 1 further comprising a first magnet disposed upon the membrane.

10. The micropump of claim 9 further comprising a second magnet disposed upon the membrane, wherein the first magnet is positioned adjacent to the first chamber and the second magnet is positioned adjacent the second chamber.

11. The micropump of claim 9 comprising a plurality of magnets, the plurality of magnets being disposed on the membrane adjacent to either of the first chamber and the second chamber.

12. The micropump of claim 9 wherein the first magnet is a neodymium-iron-boron rare earth magnet.

13. The micropump of claim 10 wherein the second magnet is a neodymium-iron-boron rare earth magnet.

14. The micropump of claim 1 wherein the flexible membrane is constructed of a soft polymer material mixed with a magnetic material.

15. The micropump of claim 14 wherein the soft polymer material is polydimethylsiloxane.

16. A micropump for delivering a fluid, the micropump comprising:

a pump assembly including

a first pump body defining a first fluid body flow path, the first pump body including

a first chamber, the first chamber including a first chamber wall and a first side wall,

a first inlet and a first outlet, wherein the first inlet and first outlet are in fluid communication with the first chamber,

a second pump body defining a second fluid body flow path, the second pump body including

a second chamber, the second chamber including a second chamber wall and a second side wall,

a second inlet and a second outlet, wherein the second inlet and the second outlet are in fluid communication with the second chamber, and

a flexible membrane disposed between the first chamber and the second chamber; and

an actuator assembly configured to cooperate with the pump assembly, the actuator assembly including

a driver magnetically coupled to the membrane, and

a sensor configured to detect the position of the membrane,

wherein the driver applies a magnetic force to the membrane, causing the membrane to deflect, and wherein such deflection of the membrane results in a change of pressure within the first chamber and the second chamber thereby resulting in fluid flow, and

wherein the pump assembly is configured do direct the fluid flow in a predetermined direction without a valve.

17. The micropump of claim 16 wherein the first inlet further includes a first inlet passage, the first inlet passage including

a first inlet throat having a first inlet throat width and a first inlet end having a first inlet end width,

wherein the first inlet passage is configured such that fluid flows in a direction from the first inlet throat to the first inlet end, and

wherein the first inlet end is disposed in the first side wall, and wherein the first inlet throat width is less than the first inlet end width.

18. The micropump of claim 17 wherein the first outlet further includes a first outlet passage, the first outlet passage including

a first outlet throat having a first outlet throat width and a first outlet end having a first outlet end width,

wherein the first outlet passage is configured such that fluid flows in a direction from the first outlet throat to the first outlet end, and

wherein the first outlet throat is disposed in the first side wall, and wherein the first outlet throat width is less than the first outlet end width.

19. The micropump of claim 18 wherein the first inlet passage and the first outlet passage are configured to allow fluid flow through the first chamber substantially in the direction from the first inlet to the first outlet.

20. The micropump of claim 16 further including:

a first inlet passage including

a first inlet throat having a first inlet throat width and a first inlet end having a first inlet end width,

wherein the first inlet passage is configured such that fluid flows in a direction from the first inlet throat to the first inlet end, and

wherein the first inlet end is disposed in the first side wall, and wherein the first inlet throat width is less than the first inlet end width;

a first outlet passage including

a first outlet throat having a first outlet throat width and a first outlet end having a first outlet end width,

wherein the first outlet passage is configured such that fluid flows in a direction from the first outlet throat to the first outlet end, and

wherein the first outlet throat is disposed in the first side wall, and wherein the first outlet throat width is less than the first outlet end width;

a second inlet passage including

a second inlet throat having a second inlet throat width and a second inlet end having a second inlet end width,

wherein the second inlet passage is configured such that fluid flows in a direction from the second inlet throat to the second inlet end, and

wherein the second inlet end is disposed in the second side wall, and wherein the second inlet throat width is less than the second inlet end width;

a second outlet passage including

a second outlet throat having a second outlet throat width and a second outlet end having a second outlet end width,

wherein the second outlet passage is configured such that fluid flows in a direction from the second outlet throat to the second outlet end, and

wherein the second outlet throat is disposed in the second side wall, and wherein the second outlet throat width is less than the first outlet end width.

21. The micropump of claim 16 further comprising a first magnet disposed upon the membrane.

22. The micropump of claim 21 further comprising a second magnet disposed upon the membrane, wherein the first magnet is positioned adjacent to the first chamber and the second magnet is positioned adjacent the second chamber.

23. The micropump of claim 21 comprising a plurality of magnets, the plurality of magnets being disposed on the membrane adjacent to either of the first chamber and the second chamber.

24. The micropump of claim 21 wherein the first magnet is a neodymium-iron-boron rare earth magnet.

25. The micropump of claim 22 wherein the second magnet is a neodymium-iron-boron rare earth magnet.

26. The micropump of claim 16 wherein the flexible membrane is constructed of a soft polymer material mixed with a magnetic material.

27. The micropump of claim 26 wherein the soft polymer material is polydimethylsiloxane.

28. The micropump of claim 16 wherein the flexible membrane is configured for adjustable tensioning, allowing the flexibility of the membrane to be changed in relation to the magnetic force applied to the membrane by the driver.

29. The micropump of claim 21 wherein the driver further includes a first magnetic coil positioned proximate to the pump body, the first magnetic coil comprising a wire winding and defining an outer perimeter.

30. The micropump of claim 29 wherein the driver further includes a sensor configured to detect the position of the first magnet, the sensor being located adjacent to the outer perimeter of the first coil at a location where the magnetic flux density of the first coil is negligible compared to the magnetic flux density of the first magnet.

31. The micropump of claim 30 wherein the sensor is a Hall effect sensor.

32. The micropump of claim 16 wherein the driver further includes a feedback control system configured to control displacement of the membrane by sensing the position of the magnet attached to the membrane, comparing the position to a predetermined set point, and adjusting the magnetic force applied to the membrane.

33. A micropump assembly for delivering a fluid from a fluid reservoir, the micropump assembly comprising:

a pump cartridge including

a first pump body defining

a first chamber, the first chamber including a first chamber wall and a first side wall,

a first inlet and a first outlet, wherein the first inlet and first outlet are in fluid communication with the first chamber,

a second pump housing defining

a second chamber, the second chamber including a second chamber wall and a second side wall,

a second inlet and a second outlet, wherein the second inlet and the second outlet are in fluid communication with the second chamber, and

a flexible membrane disposed between the first chamber and the second chamber,

wherein the pump cartridge is configured to allow fluid communication from the fluid reservoir to at least one of the first chamber and the second chamber; and

a housing enclosing

an actuator assembly configured to cooperate with the micropump cartridge, the actuator assembly including

a driver magnetically coupled to the membrane, and

a first sensor configured to detect the position of the membrane,

wherein the driver applies a magnetic force to the membrane, causing the membrane to deflect, and wherein such deflection of the membrane results in a change of pressure within the first chamber and the second chamber thereby resulting in fluid flow,

a controller coupled to the driver and configured to control the position of the membrane by receiving input from the first sensor and adjusting the magnetic force applied by the driver, and

a power supply configured to energize the driver and the controller,

wherein the housing is configured such that the micropump cartridge may be inserted into and retained within the actuator assembly.

34. The micropump assembly of claim 33 wherein the micropump cartridge is configured for a single use.

35. The micropump assembly of claim 34 wherein the fluid reservoir is attached to the micropump cartridge.

36. The micropump assembly of claim 34 wherein the fluid reservoir is contained within the housing and is configured for coupling with the micropump cartridge upon insertion of the micropump cartridge into the housing.

37. The micropump assembly of claim 33 wherein the controller is configured to receive a feedback signal from the first sensor, and wherein the controller is configured to compare the position of the magnet attached to the membrane to a predetermined set point, and wherein the controller is configured to adjust the magnetic force applied to the membrane in response to the feedback signal.

38. The micropump assembly of claim 37 wherein the controller is a proportional-integral-derivative type controller.

39. The micropump assembly of claim 33 further including a second sensor configured to detect a volume of fluid within the fluid reservoir, and wherein the controller is configured to receive input from the second sensor such that the controller is able to calculate and predict fluid flow.

40. The micropump assembly of claim 33 wherein the controller is configured to calculate the volume of fluid delivered based on the feedback signal from the first sensor.

41. The micropump assembly of claim 40 wherein the controller is configured to compare the volume of fluid delivered based on the feedback signal from the first sensor with the volume input from the second sensor, and wherein the controller is configured to provide an output signal if the compared volumes are outside of a predetermined range.

42. The micropump assembly of claim 41 wherein the output signal is at least one of an alarm and shutting down.

43. A method of fabricating a micropump, the method comprising the steps of:

fabricating a flexible membrane from a polymer material including the steps of

spin coating a first polymer layer on a silicon wafer and allowing the first polymer layer to cure,

placing magnetic material on the first polymer layer,

applying a second polymer layer around the magnetic material and allowing the second polymer layer to cure, and

applying a third polymer layer and allowing the third polymer layer to cure;

fabricating a rigid pump body by pouring liquid polymer material into a mold configured to form a fluid chamber, an inlet channel, and an outlet channel, and allowing the liquid polymer to cure;

aligning the flexible membrane with the rigid pump body; and

bonding the flexible polymer membrane to the rigid pump body.

44. The method of claim 43 wherein the first polymer layer is spin coated to a thickness of approximately 0.15 mm.

45. The method of claim 44 wherein the first polymer layer is allowed to cure at 75 degrees Celsius for 2 hours.

46. The method of claim 43 wherein the second polymer layer is applied to a thickness of approximately 0.5 mm.

47. The method of claim 44 wherein the second polymer layer is allowed to cure at 100 degrees Celsius for 30 minutes.

48. The method of claim 43 wherein the third polymer layer is applied to a thickness of approximately 0.15 mm.

49. The method of claim 48 wherein the third polymer layer is allowed to cure at 75 degrees Celsius for 2 hours.

50. The method of claim 43 wherein the mold for the rigid pump body is formed from an epoxy-based negative photoresist material.

51. The method of claim 50 wherein the photoresist material is SU-8.

52. The method of claim 43 wherein bonding of the flexible polymer layer to the rigid pump body is performed using an adhesive.

53. The method of claim 43 wherein bonding of the flexible polymer membrane is performed using an oxygen plasma method including the step of curing a film of polymer disposed between the flexible membrane and the molded pump body at 100 degrees Celsius for 20 minutes.

54. The method of claim 43 wherein bonding of the flexible polymer membrane is performed using an oxygen plasma method including the step of curing a film of uncured polymer between the flexible membrane and the molded pump body by applying microwaves in an atmosphere of 10% oxygen for 10 seconds.

55. The method of claim 43 wherein the polymer material is selected from the group consisting of parylene, polyimide, SU-8, and polydimethylsiloxane.

56. The method of claim 43 wherein the flexible membrane is fabricated from a mixture of 10 parts polydimethylsiloxane and 1 part curing agent.

57. The method of claim 43 wherein the rigid pump body is fabricated from a mixture of 5 parts polydimethylsiloxane and 1 part curing agent.

58. A micropump for delivering a fluid, the micropump comprising:

a pump assembly including

a first pump body defining

a first chamber, the first chamber including a first chamber wall and a first side wall,

a first inlet and a first outlet, wherein the first inlet and first outlet are in fluid communication with the first chamber, and

a first flexible membrane disposed over the first chamber opposite the first chamber wall,

a second pump body defining

a second chamber, the second chamber including a second chamber wall and a second side wall,

a second inlet and a second outlet, wherein the second inlet and the second outlet are in fluid communication with the second chamber, and

a second flexible membrane disposed over the second chamber opposite the second chamber wall;

at least a third pump body disposed between the first pump body and the second pump body, the third pump body defining

a third chamber including a third side wall,

third inlet and a third outlet, wherein the third inlet and the third outlet are in fluid communication with the third chamber,

wherein the at least third chamber is adjacent the first membrane and the second membrane; and

an actuator assembly configured to cooperate with the pump assembly, the actuator assembly including

a driver magnetically coupled to the first membrane and the second membrane, and

at least one sensor configured to detect the position of the first membrane and the second membrane,

wherein the driver applies a magnetic force to the first membrane and the second membrane, causing the first membrane and the second membrane to deflect, and wherein such deflection of the first membrane and the second membrane results in a change of pressure within the first chamber, the second chamber, and the third chamber thereby resulting in fluid flow.

59. The micropump of claim 58 further comprising

a plurality of intermediate pump bodies disposed between the first pump body and the second pump body, wherein each intermediate pump body defines an intermediate fluid chamber including a side wall, an inlet, and an outlet, the inlet and outlet being in fluid communication with the intermediate fluid chamber;

and

a plurality of intermediate flexible membranes, wherein each intermediate flexible membrane is disposed between adjacent intermediate pump bodies, and wherein the driver is magnetically coupled to each of the intermediate membranes.