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INDUCTIVE PLASMA SOURCE WITH METALLIC SHOWER HEAD USING B-FIELD CONCENTRATOR

  • US 20110278260A1
  • Filed: 05/14/2010
  • Published: 11/17/2011
  • Est. Priority Date: 05/14/2010
  • Status: Abandoned Application
First Claim
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1. A lid assembly for a plasma chamber, comprising:

  • a first annular inductive coil nested with a first conductive ring.

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